SFG Graphite
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Applications
- Ion implant
- Plasma etch
- Deposition
Specifications
| Particle size: | 1µm (40 µin) |
| Pore size1 | 0.3 µm (12 µin) |
| Coefficient of Thermal Expansion2 | 8.1 µm/m °C (4.5 µin/in °F) |
| Compressive strength: | 166 MPa (24,100 psi) |
| Flexural strength3: | 96 MPa (13,900 psi) |
| Tensile strength4: | 67 MPa (9700 psi) |
| Shore hardness: | 84 |
| Electrical resistivity: | 1950 µΩ-cm (770 µΩ-in) |
| Apparent density: | 1.77 g/cm3 (0.064 lb/in3) |
| Thermal conductivity: | 75 W/m-K (44 BTU-ft/hr/ft2 °F) |
| Oxidation threshold5: | 470° C (880° F) |
1Measured using Hg porosimetry method. 2Average for temperature range of RT - 800°C. 3Measured using 4-point bend method. 4Estimated at 70% of flexural strength. 5Temperature that results in 1% wt. loss in 24 hrs. Oxidation threshold increases by approximately 100°C if graphite is purified. Test sample size equals 0.5” x 0.5” x 1.0".
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Part Numbers
| Part Number | Material Type |
|---|---|
| DE-12476 | Purified Sample |