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SUPERSiC®-GS

Using a propriety chemical vapor conversion (CVC) process, Entegris’ process partially converts the outer layers of graphite to SiC. This converts the graphite incompletely, without creating a distinct SiC layer that could delaminate under stress, resulting in a composite SiC shell.

  • Graphite coated with a .030" (750 microns) infiltrated layer of SUPERSiC®
  • Increased thermal shock resistance compared to solid SiC
  • Initial plasma erosion resistance and physical abrasion resistance similar to SiC
  • Ability to hold a tighter tolerance with an as-converted artifact
  • Read More Read Less
Interested in SUPERSiC®-GS?

Contact your Entegris account manager or  contact us

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