SUPERSiC®-GS
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- Ion implant beamline components
Specifications
Bulk density:1 | 2.18 g/cm3 (0.079 lb/in3) |
Total impurity level: | <10 ppm |
Flexural strength:2 | 69 MPa (10,000 psi) |
Thermal conductivity K: | 88 W/m-K (51 Btu-ft/hr/ft2°F) |
Electrical resistivity: | 3050 μΩ-cm (1200 μΩ-in) |
Average CTE from 250 –750°C: | 4.5 10 -6/K (2.5 10 -6/°F) |
1Based on SA / V ratio of 12.5. 24 pt based on 0.25” × 0.5” × 4” MOR bar.
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