SUPERSiC®-Si-8C
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Reference Materials
Applications
- Large optical components
- Lithography components
Specifications
| Apparent density: | 3.03 g/cm3 (0.110 lb/in3) |
| Bulk density: | 2.95 g/cm3 (0.107 lb/in3) |
| Total porosity: | 4% (porosity is sealed under the dense coating, porosity is not exposed to the process) |
| Open porosity: | 0% (porosity sealed off by CVD SiC coating) |
| Total impurity level: | <10 ppm |
| Flexural strength: | 192 MPa (27,900 psi) |
| Tensile strength: | 124 MPa (17,940 psi) |
| Elastic modulus: | 331 GPa (48 106 psi) |
| Specific stiffness: | 112 kN.m/g |
| Poisson’s ratio: | 0.17 |
| Dynamic shear modulus: | 138 GPa (20 106 psi) |
| Fracture toughness: | 3.8 MPa.m0.5 |
| Thermal diffusivity: | 115 mm2/s |
| Instantaneous CTE at RT: | 2.4 10-6/K (1.3 10-6/°F) |
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