SUPERSiC®-Si
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact UsThank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
- Etch systems
- Optics silicon cladding
Specifications
Apparent density: | 3.01 g/cm3 (0.109 lb/in3) |
Bulk density: | 2.93 g/cm3 (0.106 lb/in3) |
Total porosity: | 4% |
Open porosity: | 1% |
Total impurity level: | <10 ppm |
Flexural strength: | 192 MPa (27,900 psi) |
Tensile strength: | 124 MPa (17,940 psi) |
Elastic modulus: | 331 GPa (48 106 psi) |
Specific stiffness: | 113 kN.m/g |
Poisson’s ratio: | 0.17 |
Dynamic shear modulus: | 138 GPa (20 106 psi) |
Fracture toughness: | 3.78 MPa.m0.5 |
Hardness: | 1643 kg/mm2 |
Thermal diffusivity: | 115 mm2/s |
Thermal conductivity: | 220 W/m-K (127 BTU-ft/hr/ft2°F) |
Instantaneous CTE at RT: | 2.4 10-6/K (1.3 10-6/°F) |
Successfully Opted for software Updates