Entegris is the global leader in materials integrity management. The company delivers technology, product and service solutions that purify, protect and transport critical materials used in the semiconductor and other high-technology industries. These solutions are manufactured and serviced around the globe, with support in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Entegris is ISO 9001 certified.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Using a propriety chemical vapor conversion (CVC) process, Entegris’ process partially converts the outer layers of graphite to SiC. This converts the graphite incompletely, without creating a distinct SiC layer that could delaminate under stress, resulting in a composite SiC shell.
Graphite that is coated with a .010" (225 microns) infiltrated layer of SUPERSiC®
Higher electrical conductivity than CVD SiC coated graphite
SiC shell is thicker than conventional CVD coatings over graphite
Lower cost due to elimination of post conversion machining
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Ion implant beamline components
2.07 g/cm3 (0.075 lb/in3)
Total impurity level:
96 MPa (14,000 psi)
Thermal conductivity K:
130 W/m-K (75 Btu-ft/hr/ft2°F)
2080 μΩ-cm (820 μΩ-in)
Average CTE from 250 –750°C:
4.5 10 -6/K (2.5 10 -6/°F)
1Based on SA / V ratio of 12.5. 24 pt based on 0.25” × 0.5” × 4” MOR bar.