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SUPERSiC®-TS

Using a propriety chemical vapor conversion (CVC) process, Entegris’ process partially converts the outer layers of graphite to SiC. This converts the graphite incompletely, without creating a distinct SiC layer that could delaminate under stress, resulting in a composite SiC shell.

  • Graphite that is coated with a .010" (225 microns) infiltrated layer of SUPERSiC®
  • Higher electrical conductivity than CVD SiC coated graphite
  • SiC shell is thicker than conventional CVD coatings over graphite
  • Lower cost due to elimination of post conversion machining
  • Read More Read Less
Interested in SUPERSiC®-TS?

Contact your Entegris account manager or  contact us

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