Using a propriety chemical vapor conversion (CVC) process, Entegris’ process partially converts the outer layers of graphite to SiC. This converts the graphite incompletely, without creating a distinct SiC layer that could delaminate under stress, resulting in a composite SiC shell.
Graphite that is coated with a .010" (225 microns) infiltrated layer of SUPERSiC®
Higher electrical conductivity than CVD SiC coated graphite
SiC shell is thicker than conventional CVD coatings over graphite
Lower cost due to elimination of post conversion machining