Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
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For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Using a propriety chemical vapor conversion (CVC) process, Entegris’ process partially converts the outer layers of graphite to SiC. This converts the graphite incompletely, without creating a distinct SiC layer that could delaminate under stress, resulting in a composite SiC shell.
Graphite that is coated with a .010" (225 microns) infiltrated layer of SUPERSiC®
Higher electrical conductivity than CVD SiC coated graphite
SiC shell is thicker than conventional CVD coatings over graphite
Lower cost due to elimination of post conversion machining
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Ion implant beamline components
2.07 g/cm3 (0.075 lb/in3)
Total impurity level:
96 MPa (14,000 psi)
Thermal conductivity K:
130 W/m-K (75 Btu-ft/hr/ft2°F)
2080 μΩ-cm (820 μΩ-in)
Average CTE from 250 –750°C:
4.5 10 -6/K (2.5 10 -6/°F)
1Based on SA / V ratio of 12.5. 24 pt based on 0.25” × 0.5” × 4” MOR bar.