M200 Wafer SMIF Pods
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ID Options Include:
• BRCL, 2x = Barcode label, includes two
• CRDH = TR14 style cardholder
• ZMRK = Lasermarking
• SNSR, BLCKL, 2x = Sensor blocking label, includes two
• TRVH = Electronic ID traveller tag holder
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Reference Materials
CAD
CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.
Applications
Coupled with our advanced 200 mm wafer transport carriers, these isolation pods provide contamination control to semiconductor manufacturers during:
- Contamination-free wafer transport
- Environmentally secure wafer storage
Specifications
General Specifications
| Materials of construction | Shell | Polycarbonate |
| Door | Carbon-filled polycarbonate | |
| Wafer lock and frame | Polycarbonate | |
| Cassette hold down | Filled PTFE | |
| Cassette guides | Polycarbonate | |
| Wafer carriers | Accommodates most 25- and 26-capacity 200 mm wafer carriers - M200 series for most standard carriers - M205 series for wide flange carriers |
|
| Base dimensions | 282.19 mm × 292.23 mm (11.125” × 11.5”) | |
| Pod height (without AK handle) | 250.19 mm (9.85”) | |
| Pod height (top of AK handle) | 291.14 mm (11.46”) | |
| Pod Height (bottom of AK handle) | 282.80 mm (11.13”) | |
| Pod height (bottom of side handle) | 152.91 mm (6.02”) | |
| Weight (empty pod) | 2.58 kg (5.7 lbs) | |
| Weight (pod shell) | 1.91 kg (4.2 lbs) | |
| Weight (pod door) | 0.67 kg (1.5 lbs) | |
| Note: Conforms to SEMI® E19 | ||
Product Options
| Product Type | Standard, high purity |
| Shell colors | Amber, clear, black |
| Identification | Bar code and alphanumeric character labels |
| Color handles | |
| Laser marking bar codes and alphanumeric characters | |
| Card holder and traveler tag | |
| Handling | Top automation handle |
| Carrying handle |
Successfully Opted for software Updates
Part Numbers
| Part Number | Dome Color | Dome Housing | Handle Color | Wafer Retainer Type | Dome Top Interface | Door Type | Cassette Interface | ID Option |
|---|---|---|---|---|---|---|---|---|
| M200-5010 | Clear | Standard | Black | 8" PC Blade (G1) | Top AK flange | M200 door | Wide guide | None |
| M200-5010E | Clear | Standard | Black | 8" PC Blade (G1) | Top AK flange | E200 | Wide guide | None |
| M200-5022 | Amber | Standard | Black | 8" PC Blade (G1) | Top AK flange | M200 door | Wide guide | TRVH |
| M200-5023 | Amber | Standard | Black | 8" PC Blade (G1) | None | M200 door | Wide guide | TRVH |
| M200-5025EP | Amber | Standard | Black | 8" Tan PEEK™ Spring (G3) | None | E200 | Narrow guide | BRCL, 2X |
| M200-5028 | Clear | Standard | Black | 8" PC Blade (G1) | Top AK flange | M200 door | Wide guide | TRVH |
| M200-5046 | Clear | Recessed | Black | 8" Tan PEEK™ Spring (G3) | None | M200 door | Wide guide | TRVH |
| M200-5082 | Amber | Standard | Black | 8" Tan PEEK™ Spring (G3) | None | M200 door | Wide guide, BEOL | None |
| M200-5090E | Clear | Standard | Black | 8" Tan PEEK™ Spring (G3) | None | E200 | Wide guide | CRDH, TRVH, LZMRK |
| M200-5093E | Clear | Standard | Red | 8" Tan PEEK™ Spring (G3) | None | E200 | Wide guide | CRDH, TRVH, LZMRK |
| M200-5110 | Clear | Standard | Black | 8" Tan PEEK™ Spring (G3) | Top AK flange w/ centering adapter | M200 door | Narrow guide | None |
| M200-5111 | Clear | Standard | Green | 8" Tan PEEK™ Spring (G3) | Top AK flange w/ centering adapter | M200 door | Narrow guide | None |
| M200-5112 | Clear | Standard | Tan | 8" Tan PEEK™ Spring (G3) | Top AK flange w/ centering adapter | M200 door | Narrow guide | None |
| M200-5112EFJ | Clear | Standard | Tan | 8" Tan PEEK™ Spring (G3) | Top AK flange w/ centering adapter | E200 | Step guide | None |
| M200-5114 | Clear | Standard | Black | 6" PC Blade (G1) | None | E200 | Wide guide | None |
| M200-5115 | Amber | Standard | Black | 6" PC Blade (G1) | None | E200 | Wide guide | None |
| M200-E046 | Clear | Recessed | Black | 8" Tan PEEK™ Spring (G3) | None | E200 | Wide guide | TRVH |
| M200-ET046-0110 | Amber | Recessed | Tan | 8" Black PEEK™ Spring (G3-M) | None | E200 door with ESI (enhanced SMIF interface) | Wide guide | TRVH |
| M200-ET046-10 | Clear | Recessed | Tan | 8" Black PEEK™ Spring (G3-M) | None | E200 door with ESI (enhanced SMIF interface) | Wide guide | TRVH |
| M205-2002-16S | Clear | Standard | Red | 8" Tan PEEK™ Spring (G3) | None | None | N/A | TRVH |
ID Options Include:
• BRCL, 2x = Barcode label, includes two
• CRDH = TR14 style cardholder
• ZMRK = Lasermarking
• SNSR, BLCKL, 2x = Sensor blocking label, includes two
• TRVH = Electronic ID traveller tag holder