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200 mm Wafer Processing

Addressing automation, contamination control, and productivity requirements for today's 200 mm fabs.

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide safe and reliable 200 mm wafer processing solutions.

From SMIF pods with superior minienvironment control, to wafer process carriers for wet chemical processing, to advanced transport carriers for automated handling and secure storage boxes, we have solutions to meet your specific wafer handling requirements.

 

Featured Information

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Yield Advantages Through Maintaining and Upgrading FOUP Populations
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Featured Information

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Yield Advantages Through Maintaining and Upgrading FOUP Populations
Request White Paper

Featured Information

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Yield Advantages Through Maintaining and Upgrading FOUP Populations
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Narrow Your Selection
  • Product Type
  • Industry
  • Process
M20X Wafer SMIF Pods
M20X Wafer SMIF Pods
M20X Wafer SMIF Pods
Advanced wafer SMIF pods for 200 mm fabs provide reliable wafer isolation in a controlled environment
Product Type
  • Wafer SMIF pod
 Wafer Capacity
  • 26
  • 25
  • 13
 Industry
  • Semiconductor
 Process
  • Wafer Handling
20X Series 200 mm Wafer Transport Carriers
20X Series 200 mm Wafer Transport Carriers
20X Series 200 mm Wafer Transport Carriers
Our closed-side wall 200 mm wafer carriers offer dramatic performance benefits over traditional low- and midrange wafer carriers
Product Type
  • Transport wafer carrier
 Wafer Capacity
  • 25
  • 13
  • 26
 Industry
  • Semicondutor
 Process
  • Wafer Handling
200 Series 200 mm Wafer Transport Carriers
200 Series 200 mm Wafer Transport Carriers
200 Series 200 mm Wafer Transport Carriers
Reliable performance for automated material handling system (AMHS) applications.
Product Type
  • Transport wafer carrier
 Wafer Capacity
  • 25
  • 26
 Industry
  • Semiconductor
 Process
  • Wafer Handling
200 mm Process Wafer Carriers
200 mm Process Wafer Carriers
200 mm Process Wafer Carriers
Enhanced wafer process carriers are perfect for wet chemical processing applications.
Product Type
  • Process wafer carrier
  • Process enhancement
 Wafer Capacity
  • 25
  • 26
  • 50
 Industry
  • Semiconductor
 Process
  • Wafer Handling
A200 Wafer SMIF Pods
A200 Wafer SMIF Pods
A200 Wafer SMIF Pods
Excellent structural design and outgassing performance with superior minienvironment control
Product Type
  • Wafer SMIF pod
 Wafer Capacity
  • 26
  • 13
  • 25
 Industry
  • Semiconductor
 Process
  • Wafer Handling
198/192 Series 200 mm Wafer Transport Carriers
198/192 Series 200 mm Wafer Transport Carriers
198/192 Series 200 mm Wafer Transport Carriers
Open-side wall 200 mm wafer carriers designed for advanced wafer transport
Product Type
  • Transport wafer carrier
 Wafer Capacity
  • 25
 Industry
  • Semiconductor
 Process
  • Wafer Handling
200 mm Storage Boxes
200 mm Storage Boxes
200 mm Storage Boxes
200 mm wafer storage boxes offer outstanding protection and provide superior automated and manual handling.
Product Type
  • Storage/WIP box
 Wafer Capacity
  • 13
  • 25
  • 26
 Industry
  • Semiconductor
 Process
  • Wafer Handling
Related Product Categories
150 mm Wafer Processing

To support the semiconductor industry's requirements for advanced 150 mm wafer handling, we offer a variety of wafer carriers, handling solutions and accessories that safely transport your silicon wafers.
125 mm Wafer Processing

Reliable wafer carriers and storage boxes that address the automation, contamination, and productivity concerns of today's 125 mm (5") fabs.

150 mm and Smaller Wafer Carrier Accessories

Learn about the numerous wafer carrier handles, wafer retainers, storage box cushions, and traveler envelopes available for use with our 150 mm (6"), 125 mm (5"), and 100 mm (4") wafer storage and handling products.
100 mm Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide 100 mm (4") wafer processing solutions to safely and reliably transport and protect silicon wafers.

300 mm Front Opening Unified Pods (FOUPs)

Our FOUPs (front-opening unified pods) hold 300 mm wafers safely and securely while they are transported and transferred within the fab as they move through hundreds of sophisticated process steps. Designed to address not only particles but to also minimize and control VOC, oxygen, and relative humidity (RH), our FOUPs provide superior microenvironment control, optimum automation integration, and low cost of ownership.
200 mm Accessories

Optimize the cleanliness and performance of your A200 and M200 wafer microenvironments with E200 door assemblies, replacement gaskets, handles, door seal kits, and more. 
Labware

We offer a wide variety of labware products to assist with wafer processing. Learn about our tweezers, tongs, vacuum probes, beakers, funnels strainers, dippers, baskets, trays, and more.
76.2 mm 3" Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide 76.2 mm (3") wafer processing solutions to safely and reliably transport and protect silicon wafers.

Chucks

Our chuck solutions use innovative coating technologies which make for a very flat surface that prevents metal contamination, reduces particles and is durable to last millions of wafer cycles.
2.5" and Smaller Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide 2.5" and smaller wafer processing solutions to safely and reliably transport and protect silicon wafers.

CMP Cleaning Brushes

Our portfolio of Planarcore® PVA brushes delivers superior performance and wafer-to-wafer uniformity in post-CMP wafer cleaning applications.

CMP Pads

Our portfolio of CMP pads provides exact hardness, pore sizes, and compressibility to meet CMP application requirements

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