200 mm Wafer Processing


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Advanced wafer SMIF pods for 200 mm fabs provide reliable wafer isolation in a controlled environment
Product Type
  • Wafer SMIF pod
Wafer Capacity
  • 25
  • 26
Our closed-side wall 200 mm wafer carriers offer dramatic performance benefits over traditional low- and mid-range wafer carriers
Product Type
  • Transport wafer carrier
Wafer Capacity
  • 25
  • 26
Reliable performance for automated material handling system (AMHS) applications.
Materials
  • STAT-PRO® 9000
  • STAT-PRO® 3000
  • STAT-PRO® 100
  • Polypropylene
  • FluoroSentry®
Product Type
  • Transport wafer carrier
Industry
  • Semiconductor
Process
  • Wafer Handling
Enhanced wafer process carriers are perfect for wet chemical processing applications.
Materials
  • STAT-PRO® 1000 PFA
  • PFA with Reinforcement
Product Type
  • Process wafer carrier
  • Process enhancement
Wafer Capacity
  • 12
  • 13
  • 25
  • 26
  • 50
  • 52
Industry
  • Semiconductor
Excellent structural design and outgassing performance with superior minienvironment control
Product Type
  • Wafer SMIF pod
Wafer Capacity
  • 25
  • 26
Wafer carriers designed for advanced wafer transport
Materials
  • STAT-PRO® 3000 Carbon Fiber PEEK
  • EMSTAT AR+ Carbon Fiber Polypropylene with PTFE
  • Polypropylene
  • STAT-PRO® 100 Carbon Powder Polypropylene
  • STAT-PRO® 9000 CNT PEEK
Product Type
  • Transport wafer carrier
Industry
  • Semiconductor
Process
  • Wafer Handling
200 mm wafer storage boxes with an ultrapure, transparent silicon oxide coating. OxiMax™ coating has low internal stress and is highly adherent and micro-conformal to substrate surfaces.
Bottom Material
  • STAT-PRO® 175
  • STAT-PRO® 100
  • Polycarbonate
  • Polypropylene
  • EMSTAT™ AR
  • EMSTAT™ AR+
Cover Material
  • STAT-PRO® 175
  • STAT-PRO® 100
  • Polycarbonate
  • Polypropylene
  • EMSTAT™ AR
  • EMSTAT™ AR+
Product Type
  • Storage/WIP box
Industry
  • Semiconductor
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