A300 G3 FOUP Accessories and Replacement Parts
Contact your Entegris account manager or
- 300 mm wafer transport
- Compliant to SEMI standards
- FIMS compatible
- Configurable A, B, C or D info pads for product segregation
Specifications
Accessories and Replacement Parts
- Door assembly
- Door gasket
- Filter membrane
- Purge module
- Diffusers
- Information ID plugs
Successfully Opted for software Updates