300 mm Front Opening Unified Pods (FOUPs)


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Yield Advantages Through Maintaining and Upgrading FOUP Populations
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A front-opening, unified pod platform with superior microenvironment control that provides clean and secure wafer transport, optimum automation in integration, and low cost of ownership for your facility
Product Type
  • FOUP
Industry
  • Semiconductor
Process
  • Wafer Handling
Spectra™ FOUP accessories including filter membranes and door gaskets that help maintain FOUP fleets, eliminating costly replacements
Product Type
  • Accessories and Replacement Parts
Industry
  • Semiconductor
Process
  • Wafer Handling
The A300 G3 FOUP offers advanced wafer isolation technology in a cost-effective design for 300 mm wafer processing.
Product Type
  • FOUP
Industry
  • Semiconductor
Process
  • Wafer Handling
A300 G3 FOUP accessories including filter membranes and door gaskets that help maintain FOUP fleets, eliminating costly replacements
Product Type
  • Accessories and Replacement Parts
Industry
  • Semiconductor
Process
  • Wafer Handling
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