FOUP platform with superior microenvironment control
Our FOUPs (front-opening unified pods) hold 300 mm wafers safely and securely while they are transported and transferred within the fab as they move through hundreds of sophisticated process steps. Designed to address not only particles but to also minimize and control VOC, oxygen, and relative humidity (RH), our FOUPs provide superior microenvironment control, optimum automation integration, and low cost of ownership.
A front-opening, unified pod platform with superior microenvironment control. The Spectra™ FOUP provides clean and secure wafer transport, optimum automation in integration and low cost of ownership for your facility.