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300 mm Front Opening Unified Pods (FOUPs)

FOUP platform with superior microenvironment control

Our FOUPs (front-opening unified pods) hold 300 mm wafers safely and securely while they are transported and transferred within the fab as they move through hundreds of sophisticated process steps. Designed to address not only particles but to also minimize and control VOC, oxygen, and relative humidity (RH), our FOUPs provide superior microenvironment control, optimum automation integration, and low cost of ownership.

Featured Information

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Yield Advantages Through Maintaining and Upgrading FOUP Populations
Request White Paper

Featured Information

download-pdf
Yield Advantages Through Maintaining and Upgrading FOUP Populations
Request White Paper

Featured Information

download-pdf
Yield Advantages Through Maintaining and Upgrading FOUP Populations
Request White Paper
Narrow Your Selection
  • Product Type
  • Industry
  • Process
Spectra™ FOUPs
Spectra™ FOUPs
Spectra™ FOUPs
A front-opening, unified pod platform with superior microenvironment control that provides clean and secure wafer transport, optimum automation in integration, and low cost of ownership for your facility
Product Type
  • FOUP
 Industry
  • Semiconductor
 Process
  • Wafer Handling
Spectra™ FOUP Accessories and Replacement Parts
Spectra™ FOUP Accessories and Replacement Parts
Spectra™ FOUP Accessories and Replacement Parts
Spectra™ FOUP accessories including filter membranes and door gaskets that help maintain FOUP fleets, eliminating costly replacements
Product Type
  • Accessories and Replacement Parts
 Industry
  • Semiconductor
 Process
  • Wafer Handling
A300 G3 FOUP Accessories and Replacement Parts
A300 G3 FOUP Accessories and Replacement Parts
A300 G3 FOUP Accessories and Replacement Parts
A300 G3 FOUP accessories including filter membranes and door gaskets that help maintain FOUP fleets, eliminating costly replacements
Product Type
  • Accessories and Replacement Parts
 Industry
  • Semiconductor
 Process
  • Wafer Handling
A300 FOUPs
A300 FOUPs
A300 FOUPs
A300 FOUPs offer advanced wafer isolation technology in a cost-effective, 25- or 13-capacity design for 300 mm wafer processing
Product Type
  • FOUP
 Industry
  • Semiconductor
 Process
  • Wafer Handling
A300 Thin Wafer FOUPs
A300 Thin Wafer FOUPs
A300 Thin Wafer FOUPs
A300 FOUPs offer advanced wafer isolation technology in a cost-effective, 13-capacity design for 300 mm thin wafer processing.
Product Type
  • FOUP
 Industry
  • Semiconductor
 Process
  • Wafer Handling
A300 Heavy Duty Payload FOUPs
A300 Heavy Duty Payload FOUPs
A300 Heavy Duty Payload FOUPs
A300 FOUPs offer advanced wafer isolation technology in a cost-effective, 13 or 25 capacity design for 300 mm heavy wafer processing.
Product Type
  • FOUP
 Industry
  • Semiconductor
 Process
  • Wafer Handling
A300 Thick and Warped Wafer FOUPs
A300 Thick and Warped Wafer FOUPs
A300 Thick and Warped Wafer FOUPs
A300 FOUPs offer advanced wafer isolation technology in a cost-effective, 13-capacity design for 300 mm thick wafer processing.
Product Type
  • FOUP
 Industry
  • Semiconductor
 Process
  • Wafer handling
Related Product Categories
200 mm Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide safe and reliable 200 mm wafer processing solutions.
150 mm Wafer Processing

To support the semiconductor industry's requirements for advanced 150 mm wafer handling, we offer a variety of wafer carriers, handling solutions and accessories that safely transport your silicon wafers.
125 mm Wafer Processing

Reliable wafer carriers and storage boxes that address the automation, contamination, and productivity concerns of today's 125 mm (5") fabs.

150 mm and Smaller Wafer Carrier Accessories

Learn about the numerous wafer carrier handles, wafer retainers, storage box cushions, and traveler envelopes available for use with our 150 mm (6"), 125 mm (5"), and 100 mm (4") wafer storage and handling products.
100 mm Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide 100 mm (4") wafer processing solutions to safely and reliably transport and protect silicon wafers.

200 mm Accessories

Optimize the cleanliness and performance of your A200 and M200 wafer microenvironments with E200 door assemblies, replacement gaskets, handles, door seal kits, and more. 
Labware

We offer a wide variety of labware products to assist with wafer processing. Learn about our tweezers, tongs, vacuum probes, beakers, funnels strainers, dippers, baskets, trays, and more.
76.2 mm 3" Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide 76.2 mm (3") wafer processing solutions to safely and reliably transport and protect silicon wafers.

Chucks

Our chuck solutions use innovative coating technologies which make for a very flat surface that prevents metal contamination, reduces particles and is durable to last millions of wafer cycles.
2.5" and Smaller Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide 2.5" and smaller wafer processing solutions to safely and reliably transport and protect silicon wafers.

CMP Cleaning Brushes

Our portfolio of Planarcore® PVA brushes delivers superior performance and wafer-to-wafer uniformity in post-CMP wafer cleaning applications.

CMP Pads

Our portfolio of CMP pads provides exact hardness, pore sizes, and compressibility to meet CMP application requirements

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