our scienceour scienceOur Science
product catalogproduct catalogProduct Catalog
resourcesresourcesResources
about usabout usAbout Us
search search Search
more more More

300 mm Front Opening Unified Pods (FOUPs)

FOUP platform with superior microenvironment control

Our FOUPs (front-opening unified pods) hold 300 mm wafers safely and securely while they are transported and transferred within the fab as they move through hundreds of sophisticated process steps. Designed to address not only particles but to also minimize and control VOC, oxygen, and relative humidity (RH), our FOUPs provide superior microenvironment control, optimum automation integration, and low cost of ownership.

Featured Information

download-pdf
Yield Advantages Through Maintaining and Upgrading FOUP Populations
Request White Paper

Featured Information

download-pdf
Yield Advantages Through Maintaining and Upgrading FOUP Populations
Request White Paper

Featured Information

download-pdf
Yield Advantages Through Maintaining and Upgrading FOUP Populations
Request White Paper
Narrow Your Selection
  • Product Type
  • Industry
  • Process
Spectra™ FOUPs
Spectra™ FOUPs
Spectra™ FOUPs
A front-opening, unified pod platform with superior microenvironment control that provides clean and secure wafer transport, optimum automation in integration, and low cost of ownership for your facility
Product Type
  • FOUP
 Industry
  • Semiconductor
 Process
  • Wafer Handling
Spectra™ FOUP Accessories and Replacement Parts
Spectra™ FOUP Accessories and Replacement Parts
Spectra™ FOUP Accessories and Replacement Parts
Spectra™ FOUP accessories including filter membranes and door gaskets that help maintain FOUP fleets, eliminating costly replacements
Product Type
  • Accessories and Replacement Parts
 Industry
  • Semiconductor
 Process
  • Wafer Handling
A300 G3 FOUP Accessories and Replacement Parts
A300 G3 FOUP Accessories and Replacement Parts
A300 G3 FOUP Accessories and Replacement Parts
A300 G3 FOUP accessories including filter membranes and door gaskets that help maintain FOUP fleets, eliminating costly replacements
Product Type
  • Accessories and Replacement Parts
 Industry
  • Semiconductor
 Process
  • Wafer Handling
A300 FOUPs
A300 FOUPs
A300 FOUPs
A300 FOUPs offer advanced wafer isolation technology in a cost-effective, 25- or 13-capacity design for 300 mm wafer processing
Product Type
  • FOUP
 Industry
  • Semiconductor
 Process
  • Wafer Handling
Related Product Categories
200 mm Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide safe and reliable 200 mm wafer processing solutions.

From SMIF pods with superior minienvironment control, to wafer process carriers for wet chemical processing, to advanced transport carriers for automated handling and secure storage boxes, we have solutions to meet your specific wafer handling requirements.

 
150 mm Wafer Processing

To support the semiconductor industry's requirements for advanced 150 mm wafer handling, we offer a variety of wafer carriers, handling solutions and accessories that safely transport your silicon wafers.
125 mm Wafer Processing

Reliable wafer carriers and storage boxes that address the automation, contamination, and productivity concerns of today's 125 mm (5") fabs.
150 mm and Smaller Wafer Carrier Accessories

Learn about the numerous wafer carrier handles, wafer retainers, storage box cushions, and traveler envelopes available for use with our 150 mm (6"), 125 mm (5"), and 100 mm (4") wafer storage and handling products.
100 mm Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide 100 mm (4") wafer processing solutions to safely and reliably transport and protect silicon wafers.
200 mm Accessories

Optimize the cleanliness and performance of your A200 and M200 wafer microenvironments with E200 door assemblies, replacement gaskets, handles, door seal kits, and more. 
Labware

We offer a wide variety of labware products to assist with wafer processing. Learn about our tweezers, tongs, vacuum probes, beakers, funnels strainers, dippers, baskets, trays, and more.
76.2 mm 3" Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide 76.2 mm (3") wafer processing solutions to safely and reliably transport and protect silicon wafers.
Chucks

Our chuck solutions use innovative coating technologies which make for a very flat surface that prevents metal contamination, reduces particles and is durable to last millions of wafer cycles. 
2.5" and Smaller Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide 2.5" and smaller wafer processing solutions to safely and reliably transport and protect silicon wafers.
CMP Pad Conditioners and Cleaning Brushes

Chemical mechanical planarization (CMP) is used to polish wafer surfaces between layers of material deposition. As semiconductor nodes shrink and chip architectures become increasingly more complex, CMP continues to evolve and gain in critical importance. We use a holistic approach in our development of CMP pad conditioners and cleaning brushes to deliver industry-leading innovation that enhances yield and process stability. Our portfolio of Planargem® XT pad conditioners deliver long life, highly uniform pad conditioning while our Planarcore® PVA brushes provide superior performance and wafer-to-wafer uniformity in post-CMP wafer cleaning applications.
If you'd like to add this item to compare, please uncheck one of the other 4 items. If you'd like to add this item to compare, please uncheck one of the other 2 items.