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Spectra™ FOUPs

Front opening unified pod platform with superior microenvironment control that provides clean and secure 300 mm wafer transport.

Industry-proven door provides equipment interoperability and long life
Integral wafer supports give excellent wafer plane performance and reliable wafer access
ESD shell option provides added wafer protection
Advanced purge options are available including front/rear purge and a purge diffuser that provides maximum gas dispersion
Optimized hydrophobic materials provide wafer contact and microenvironment control

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Applications Spectra™ FOUPs Applications

Front opening unified pod platform that provides clean and secure 300 mm transport and handling
Automation compatible provides low cost of ownerhip for your facility

Specifications

Product Specifications

Dimensions	Width	416 mm (16.4")
	Depth	333 mm (13.1")
	Height	335 mm (13.2")
Weight	Empty	4.2 kg (9.26 lb)
	With wafers	7.3 kg (16.09 lb)
Wafer spacing	10 mm (0.39")
Capacity	26 wafers

Materials of Construction

Ultrapure polycarbonate or barrier material used in the FOUP shell, door housing, and door panels
Carbon-filled PEEK or high temperature barrier material (XT EBM) used in wafer contact areas in the shell, door housing, and door components
Thermoplastic elastomer (TPE) material used in the critical door seal
Entegris moisture barrier material (EBM) available to enable leading-edge wafer processing technology

Configuration Options and Accessories

Shell and Door Color Options

Amber, red, green, clear, and black (ESD shell only)

Purge Options

Front/rear standard purge
Rear advanced diffuser

Segregation Options

Info pads configurable by customer

Identification Options

Bar code and alphanumeric character labels
Color handle inserts
Cardholders
RFID tags with read/write capability

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Nov 1, 2020 Data Sheet Spectra™ FOUP

Download PDF 251.1 kB

Published Nov 29, 2018 Brochure Total Wafer Carrier Solutions

Download PDF 2.9 MB

Part Numbers

Spectra™ FOUPs Part Numbers

Part Number	Color
SPFAAN-ANSRK-NNN	Amber
SPFCCN-ANSRK-NNN	Clear
SPFGGN-ANSRK-NNN	Green
SPFRRN-ANSRK-NNN	Red