Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Leveraging proprietary coating technologies and innovative manufacturing capabilities.
Our chucks offer a very flat clamped wafer surface, uniform thermal properties, improved gas-cooling, superior plasma erosion resistance and ultra-low particle and metal generation. These advanced wafer contact surfaces are made of materials with tailorable electrical properties, have an optimal wafer contact area that improves overall performance and lifetime while minimizing contamination.
Low particle and metal generation
Fast clamping and de-clamping
Reliable wafer clamping consistency
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