Tongs
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- Wafer processing
- Wafer handling
Specifications
Part Number | Adjustable | Tip Style | Tip Width | Opening Width | Overall Size | Notes | Material |
C30-0215 | No | Squared off with wafer stop horns | 9.6 mm (0.38") | N/A | 152 mm x 37 mm x 16 mm (6.0" x 1.5" x 0.6") | Does not damage substrate surface by over-grasping, comes with protective case | PFA |
C40-0315 | Yes, 4 positions | Hooked inward with squared end | 2.5 mm (0.100") | 254 mm to 152 mm (10" to 6") | 231 mm x 35 mm x 10 mm (9.9" x 1.2" x 0.4") | N/A | ETFE |
C50-0315 | No | Squared off | 19 mm (0.75") | 2.2 mm (0.9") | 253 mm x 35 mm x 10 mm (10.3" x 1.4" x 0.8") | Extra length for deep tanks | ETFE |
C52-0215 | No | Squared off | N/A | N/A | 190 mm x 19 mm (7.5" x 0.8") | Ideal for handling large plates | PFA |
Minimum order quantities may apply. Contact Entegris for ordering information.
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