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Labware

Labware for many wafer handling needs

We offer a wide variety of labware products to assist with wafer processing. Learn about our tweezers, tongs, vacuum probes, beakers, funnels strainers, dippers, baskets, trays, and more.

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Yield Advantages Through Maintaining and Upgrading FOUP Populations
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Narrow Your Selection
  • Materials
  • Product Type
  • Industry
  • Process
Tweezers
Tweezers
Tweezers
Our tweezers are designed for ultrapure substrate handling, and each is packaged in a protective case for convenient storage
Materials
  • ETFE
  • White polypropylene
  • Glass-filled ETFE
  • Glass-filled white polypropylene
  • Natural polypropylene
  • Styrene/polystyrene
 Product Type
  • Tweezers
 Industry
  • Semiconductor
 Process
  • Wafer Handling
Tongs
Tongs
Tongs
Our corrosion-resistant tongs are designed for ultrapure wafer and substrate handling.
Materials
  • Natural PFA
  • ETFE
 Product Type
  • Tongs
 Industry
  • Semiconductor
 Process
  • Wafer Handling
Wafer Baskets
Wafer Baskets
Wafer Baskets
Choose from our large selection of advanced, no-hassle wafer baskets for processing and handling substrates
Materials
  • Blue polypropylene
  • Natural PFA
  • ETFE
 Product Type
  • Wafer basket
 Industry
  • Semiconductor
 Process
  • Wafer Handling
Dippers
Dippers
Dippers
Our PFA dippers safely secure and hold one wafer or one square plate in place for no-hassle dipping
Materials
  • PFA
 Product Type
  • Dipper
 Industry
  • Semiconductor
 Process
  • Wafer Handling
Beakers and Funnels
Beakers and Funnels
Beakers and Funnels
Ultrapure beakers and funnels available to meet your labware specifications
Materials
  • Natural PFA
 Product Type
  • Beaker or funnel
 Industry
  • Semiconductor
 Process
  • Wafer Handling
Vacuum Probes
Vacuum Probes
Vacuum Probes
A durable, polypropylene vacuum probe that operates at the tip by placing finger over the hole on the probe top
Materials
  • Blue polypropylene
 Product Type
  • Vacuum probe
 Industry
  • Semiconductor
 Process
  • Wafer Handling
Strainer Trays
Strainer Trays
Strainer Trays
Our multifunctional PFA strainer trays can be used individually, stacked, or two trays may be locked together to form a rinse basket
Materials
  • PFA
 Product Type
  • Strainer tray
 Industry
  • Semiconductor
 Process
  • Wafer Handling
Trays and Accessories
Trays and Accessories
Trays and Accessories
We provide wash trays and handling and storage trays to clean and store your devices
Materials
  • Blue polypropylene
  • STAT-PRO® 100
  • PFA
 Product Type
  • Tray or accessory
 Industry
  • Semiconductor
 Process
  • Wafer Handling
Dipper Baskets
Dipper Baskets
Dipper Baskets
Clean or etch small pieces of labware quickly and conveniently with our dipper basket
Materials
  • ETFE
 Product Type
  • Dipper basket
 Industry
  • Semiconductor
 Process
  • Wafer Handling
Related Product Categories
200 mm Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide safe and reliable 200 mm wafer processing solutions.
150 mm Wafer Processing

To support the semiconductor industry's requirements for advanced 150 mm wafer handling, we offer a variety of wafer carriers, handling solutions and accessories that safely transport your silicon wafers.
125 mm Wafer Processing

Reliable wafer carriers and storage boxes that address the automation, contamination, and productivity concerns of today's 125 mm (5") fabs.

150 mm and Smaller Wafer Carrier Accessories

Learn about the numerous wafer carrier handles, wafer retainers, storage box cushions, and traveler envelopes available for use with our 150 mm (6"), 125 mm (5"), and 100 mm (4") wafer storage and handling products.
100 mm Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide 100 mm (4") wafer processing solutions to safely and reliably transport and protect silicon wafers.

300 mm Front Opening Unified Pods (FOUPs)

Our FOUPs (front-opening unified pods) hold 300 mm wafers safely and securely while they are transported and transferred within the fab as they move through hundreds of sophisticated process steps. Designed to address not only particles but to also minimize and control VOC, oxygen, and relative humidity (RH), our FOUPs provide superior microenvironment control, optimum automation integration, and low cost of ownership.
200 mm Accessories

Optimize the cleanliness and performance of your A200 and M200 wafer microenvironments with E200 door assemblies, replacement gaskets, handles, door seal kits, and more. 
76.2 mm 3" Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide 76.2 mm (3") wafer processing solutions to safely and reliably transport and protect silicon wafers.

Chucks

Our chuck solutions use innovative coating technologies which make for a very flat surface that prevents metal contamination, reduces particles and is durable to last millions of wafer cycles.
2.5" and Smaller Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide 2.5" and smaller wafer processing solutions to safely and reliably transport and protect silicon wafers.

CMP Cleaning Brushes

Our portfolio of Planarcore® PVA brushes delivers superior performance and wafer-to-wafer uniformity in post-CMP wafer cleaning applications.

CMP Pads

Our portfolio of CMP pads provides exact hardness, pore sizes, and compressibility to meet CMP application requirements

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