Wafer Baskets
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact UsThank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
- Wafer processing
- Wafer handling
Specifications
Part Number | Compatible Handles | Compatible Tanks |
A12-01-0215 | A05, A08 | N/A |
A13-01-0215 | A05, A08 | N/A |
A14-01S-* | A01, PA01, A07, PA07, A029, PA029 | E12 |
A15-01-0215 | A01, A07, A029 | E12, E14-10-01, E22-101 |
A17-01-0215 | A05, A08 | N/A |
A26-01-0215 | A01, A07, A029 | E14-25-01 |
A47-01-* | A01, PA01, A07, PA07, A029, PA029 | E14-21-01, E14-25-01 |
A55-01-* | A01, PA01, A07, PA07, A029, PA029 | N/A |
A89-01-0215 | A05, A08 | E23-01 |
*Compatible handles and tanks are the same regardless of material.
Successfully Opted for software Updates
Part Number | Product Type | Material | Capacity | Overall Size |
---|---|---|---|---|
A12-01-0215 | Wafer basket | Natural PFA | 52 | 173 mm x 86 mm x 30 mm (6.8" x 3.4" x 1.2") |
A13-01-0215 | Wafer basket | Natural PFA | 52 | 173 mm x 86 mm x 23 mm (6.8" x 3.4" x 0.9") |
A14-01S-0215 | Wafer basket | Natural PFA | 24 | 89 mm diameter x 20 mm (3.5" diameter x 0.8") |
A14-01S-0603 | Wafer basket | Blue Polypropylene | 24 | 89 mm diameter x 20 mm (3.5" diameter x 0.8") |
A14-02S-0215 | Cover (A14) | Natural PFA | 24 | 89 mm diameter x 20 mm (3.5" diameter x 0.8") |
A15-01-0215 | Wafer basket | Natural PFA | 24 | 117 mm diameter x 46 mm (4.6" diameter x 1.8") |
A23-0215 | Wafer basket | Natural PFA | 50 | 132 mm x 89 mm x 145 mm (5.2" x 3.5" x 5.7") |
A26-01-0215 | Wafer basket | Natural PFA | 30 | 152 mm diameter x 61 mm (6.0" diameter x 2.4") |
A47-01-0215 | Wafer basket | Natural PFA | 30 | 160 mm diameter x 51 mm (6.3" diameter x 2.0") |
A55-01-0603 | Wafer basket | Blue Polypropylene | 25 | 229 mm diameter x 71 mm (9" diameter x 2.8") |
A89-01-0215 | Wafer basket | Natural PFA | 52 | 175 mm x 112 mm x 43 mm (6.9" x 4.4" x 1.7") |