Planarcore® PVA Brushes

Planarcore® PVA Brushes are designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications. The unique molded-through-the-core technology provides absolute adhesion of the PVA to the brush core, unlike standard PVA products that are merely friction fitted to the core.

High-Purity PVA
Molded through the core construction
Eliminates alignment and gapping problems, increasing system throughput
Close molded technology
Reduces downtime on tool
Decreases defectivity on wafer

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Applications Planarcore® PVA Brushes Applications

Post CMP

Specifications

Drawings

Reference Materials Product Documentation

Published Dec. 1, 2012 Data Sheet Planarcore® PVA Brushes with Molded Polypropylene Core

Download PDF 259.4 kB

Published Aug. 23, 2017 Data Sheet Planarcore® PVA Brush with Polypropylene Core for Ebara® CMP Tools

Download PDF 246.0 kB

Published Jul. 18, 2017 Application Notes Post-CMP Clean PVA Brush Advancements and Characterization in Cu/Low-K Application

Download PDF 2.1 MB

CAD CAD Symbols

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Part Numbers

Planarcore® PVA Brushes Part Numbers

Part Number	Preservative	OEM Tool	Process Platform
PVP0AMMR1	NH4OH	Applied Materials Mirra Mesa®	200 mm
PVP0ARXR1	NH4OH	Applied Materials Reflexion®	300 mm
PVP0EF3R1	NH4OH	EBARA F-REX300	300 mm
PVP0L0BR4	NH4OH	Lam Research OnTrak® Synergy Integra™	200 mm
PVP0L0TR4	NH4OH	Lam Research OnTrak® series	200 mm
PVP1AMMR1	H2O2	Applied Materials Mirra Mesa®	200 mm
PVP1ARXR1	H2O2	Applied Materials Reflexion®	300 mm
PVP1EF3R1	H2O2	EBARA F-REX300	300 mm
PVP1L0BR4	H2O2	Lam Research OnTrak® Synergy Integra™	200 mm
PVP1L0TR4	H2O2	Lam Research OnTrak® series	200 mm