Planarcore® PVA Brushes

Planarcore® PVA Brushes are designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications. The unique molded-through-the-core technology provides absolute adhesion of the PVA to the brush core, unlike standard PVA products that are merely friction fitted to the core.

High-Purity PVA
Molded through the core construction
Eliminates alignment and gapping problems, increasing system throughput
Close molded technology
Reduces downtime on tool
Decreases defectivity on wafer

Read More Read Less

Specify Your Part

Preservative

OEM Tool

Process Platform

Part Number:

Interested in an Entegris Product?

To discuss your specific needs, contact your local Entegris representative.

Don't have an Entegris representative?

Request a Quote

Please fill out the form below and someone will contact you shortly. Have an account? Sign In

* Required

First Name:

Please enter a first name

Last Name:

Please enter a last name

Country:

Please select a country

Email Address:

Please enter a valid email

Phone Number:

Please enter a valid phone number.

Company:

Please enter your company.

(Optional) Comments

An error occurred while submitting your quote request. Please try again.

Cancel

Quote Requested

Thank you for requesting a quote. Someone from Entegris will contact you shortly.

Your quote number is {0}.

Top of page

Applications Planarcore® PVA Brushes Applications

Post CMP

Specifications

Drawings

Reference Materials Product Documentation

Published Dec. 1, 2012 Data Sheet Planarcore® PVA Brushes with Molded Polypropylene Core

Download PDF 259.4 kB

Published May. 22, 2017 Data Sheet Planarcore® PVA Brush with Polypropylene Core for Ebara® CMP Tools

Download PDF 330.7 kB

Published Jul. 18, 2017 Application Notes Post-CMP Clean PVA Brush Advancements and Characterization in Cu/Low-K Application

Download PDF 2.1 MB

CAD CAD Symbols

CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.

Go to Part Selector

Part Numbers

Planarcore® PVA Brushes Part Numbers

Part Number	Preservative	OEM Tool	Process Platform
PVP0AMMR1	NH4OH	Applied Materials Mirra Mesa®	200 mm
PVP0ARXR1	NH4OH	Applied Materials Reflexion®	300 mm
PVP0EF3R1	NH4OH	EBARA F-REX300	300 mm
PVP0L0BR4	NH4OH	Lam Research OnTrak® Synergy Integra™	200 mm
PVP0L0TR4	NH4OH	Lam Research OnTrak® series	200 mm
PVP1AMMR1	H2O2	Applied Materials Mirra Mesa®	200 mm
PVP1ARXR1	H2O2	Applied Materials Reflexion®	300 mm
PVP1EF3R1	H2O2	EBARA F-REX300	300 mm
PVP1L0BR4	H2O2	Lam Research OnTrak® Synergy Integra™	200 mm
PVP1L0TR4	H2O2	Lam Research OnTrak® series	200 mm