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Planarcore® PVA Brushes
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Reference Materials
CAD
CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.
Applications
- Post CMP
Specifications
Successfully Opted for software Updates
Published Dec 1, 2012
Data Sheet
Planarcore® PVA Brushes with Molded Polypropylene Core
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259.4 kB
Published Aug 23, 2017
Data Sheet
Planarcore® PVA Brush with Polypropylene Core for Ebara® CMP Tools
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246.0 kB
Published Jul 18, 2017
Application Note
Post-CMP Clean PVA Brush Advancements and Characterization in Cu/Low-K Application
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2.1 MB
Part Numbers
Part Number | Preservative | OEM Tool | Process Platform |
---|---|---|---|
PVP0AMMR1 | NH4OH | Applied Materials Mirra Mesa® | 200 mm |
PVP0ARXR1 | NH4OH | Applied Materials Reflexion® | 300 mm |
PVP0EF3R1 | NH4OH | EBARA F-REX300 | 300 mm |
PVP0L0BR4 | NH4OH | Lam Research OnTrak® Synergy Integra™ | 200 mm |
PVP0L0TR4 | NH4OH | Lam Research OnTrak® series | 200 mm |
PVP1AMMR1 | H2O2 | Applied Materials Mirra Mesa® | 200 mm |
PVP1ARXR1 | H2O2 | Applied Materials Reflexion® | 300 mm |
PVP1EF3R1 | H2O2 | EBARA F-REX300 | 300 mm |
PVP1L0BR4 | H2O2 | Lam Research OnTrak® Synergy Integra™ | 200 mm |
PVP1L0TR4 | H2O2 | Lam Research OnTrak® series | 200 mm |