Liquid Filters
Showing 16 Products
Clean, cost-effective filtration of non-outgassing, aqueous, acid and base chemistries or advanced solvent applications
Brand Name
- Fluorogard®
- Aggressive Acids
- Aggressive Bases
- Solvent
- 28-90 nm
- >90 nm
- Point of Tool
- Bulk
These hydrophilc, high-performance filters have a high-efficiency, high-flow membrane that delivers improved bath quality
Brand Name
- Etchgard™
- Dilute Acids
- Dilute Bases
- Deposition
- >90 nm
- Point of Tool
Best-in-class linear filtration technology
Brand Name
- FlowPlane™
- Aggressive Acids
- Aggressive Bases
- Solvent
- <10 nm
- 14-22 nm
- Point of Tool
Designed for aggressive aqueous chemicals and solvents, these filters offer a cost-effective alternative for advanced wet etch and clean (WEC) applications.
Brand Name
- Fluorogard®
- Aggressive Acids
- Aggressive Bases
- Solvent
- 14-22 nm
- 28-90 nm
- >90 nm
- Point of Tool
- Bulk
Point of tool resist stripper filter
Brand Name
- Fluorogard®
- Resist Stripper
- >90 nm
- Point of Tool
Clean filtration of low-temperature, dilute bases
Brand Name
- Guardian™
- Dilute Acids
- Dilute Bases
- >90 nm
- Point of Tool
Small volume, point of dispense acid, base and solvent filter
Brand Name
Feature Size (Layer)
- Fluoroline™
- Photochemical
- Solvent
- Aggressive Acids
- Aggressive Bases
- >90 nm
- Point of Dispense
Best in class, low-temperature dilute acid filter
Brand Name
- Intercept®
- Dilute Acids
- 14-22 nm
- 28-90 nm
- >90 nm
- Point of Tool
Point-of-tool DI water filter
Brand Name
- Panelgard®
- Dilute Acids
- Dilute Bases
- DI Water
- N/A
- Point of Tool
- Bulk
Cost effective filtration for non-outgassing chemistries and solvents
Brand Name
- Savana®
- Aggressive Acids
- Aggressive Bases
- >90 nm
- Point of Tool
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