GateKeeper® SX Series Gas Purification Systems
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Reference Materials
Applications
- Metal Organic Chemical Vapor (MOCVD)
- Atomic Layer Deposition (ALD)
- Low Temperature Epitaxy (LTE)
- Other applications requiring ammonia gas
Specifications
| Model | GPS90SX | GPS100SX | GPS120SX |
| Gases purified | Ammonia (NH3) | ||
| Media type | Inorganic | ||
| Contaminants removed | Moisture (H2O): <1 ppb | ||
| Carbon Dioxide (CO2): <1 ppb | |||
| Oxygen (O2): <1 ppb | |||
| Operating pressure range | 5.51 – 17.23 bar (80 – 250 psig) | ||
| Pressure drop | <15 psi @ 100 psig and max rated flow | ||
| Maximum flow rate | 90 N•m3/hr (1397 slm) | 100 N•m3/hr (1553 slm) | 120 N•m3/hr (1863 slm) |
| Gas operating temperature | 15° – 40°C (60° – 104°F) | ||
| Outlet filtration | ISO® Class 1 (<10 particles per m3 at 0.1 μm, <2 particles per m3 at 0.2 μm) | ||
| Leak rating: | 1 × 10-9 atm cc/sec | ||
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