Chambergard™ FV50D XL Gas Diffuser

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Rapidly reduce particles and vent times in load lock and transfer chambers and feature an efficient and robust Ni disk membrane.

Rated at 1,000,000 cycles and designed to operate at higher inlet pressures
Patented, sintered nickel technology in a compact diffuser unit provides superior performance in all applications
Removes particles greater than 0.0015 µm from incoming gas, minimizing wafer defects
Easily installed/retrofitted into existing tools minimizes downtime

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Applications Chambergard™ FV50D XL Gas Diffuser Applications

Provide rapid gas venting to atmosphere without disturbing or adding particles to wafers in the chamber

Specifications

Drawings

Performance Data

Product Specifications

Materials	Diffuser element	Sintered nickel membrane filter
	House	316 L stainless steel
	Surface finish interior	<32 µin Ra
O-ring	Material	Fluoroelastomer
	Size	2-229
	Groove ID	59.9 mm (2.36")
	Groove OD	67.9 mm (2.67")
	Groove depth	2.6 mm (0.10")
Connections	Inlet	1/4" VCR^® compatible male gasket seal fitting
	Outlet	ISO NW50 bulkhead mounting compatible wiht standard ISO bulkhead clamps
Downstream cleanliness	Cleanliness less than 0.03 particles/liter (< 1 particle/ft³) >0.01 µm rated flow
Removal rating	>0.0015 µm
Operating conditions	Maximum inlet/outlet pressure with outlet to vacuum	4 bar (60 psig)
	Maximum differential pressure	5 bar (75 psid)
	Maximum operating temperature	100°C (212°F) with O-ring
		400°C (752°F) with no O-ring
Warranty	2 years*
*after shipment date

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Reference Materials Product Documentation

Published Mar 1, 2023 Data Sheet Chambergard™ FV50D XL Fast Vent Diffuser

238.4 kB

Part Numbers

Chambergard™ FV50D XL Gas Diffuser Part Numbers

Part Number	Product Type
CG2NDD050R2	Chambergard™ fast vent diffuser