Panelgard® PS Filter
Specify Your Part
Part Number:
Interested in an Entegris Product?
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact Us
Request a Quote
Quote Requested
Thank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
Top of page
Reference Materials
CAD
CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.
Applications
- Industry: Semiconductor, Flat Panel Display, Data Storage, Chemical Manufacturing
- Process: Cleaning, Facilities, Wet Etch and Clean
- Chemistry: Dilute Acids, Dilute Bases, DI Water
- Installation Point: Point of Tool, Bulk
Specifications
| PS-40 Cartridge: | |
|---|---|
| Materials: | Membrane: Hydrophilic polysulfone |
| Supports: High density polyethylene | |
| O-rings: EPDM (AS568A-118) | |
| Connections: | AS568A-118 |
| Membrane area: | 3,200 cm2 (3.5 ft2) |
| Particle retention: | 0.1 µm, 0.2 µm, 0.45 µm retention ratings |
| Greater than 99.999% particle retention at stated retention rating | |
| Maximum operating conditions: | Maximum forward differential pressure: 0.27 MPa (2.7 bar, 39 psid) at 25°C |
| Maximum operating temperature: 60°C | |
| PS-40 Disposable: | |
|---|---|
| Materials: | Membrane: Hydrophilic polysulfone |
| Supports: High density polyethylene supports, core, sleeve; polysulfone housing | |
| O-rings: EPDM | |
| Fittings: | Inlet/outlet: 1/2” NPT |
| Vent: 1/4” NPT | |
| Membrane area: | 3,200 cm2 (3.5 ft2) |
| Particle retention: | 0.1 μm, 0.2 μm, 0.45 μm retention ratings |
| Greater than 99.999% particle retention at stated retention rating | |
| Maximum operating conditions: | Maximum inlet pressure: 0.34 MPa (3.4 bar, 49 psid) at 25°C |
| Maximum forward differential pressure: 0.27 MPa (2.7 bar, 39 psid) at 25°C | |
| Maximum operating temperature: 60°C | |
| PSF Cartridge: | |
|---|---|
| Materials: | Membrane: Hydrophilic polysulfone |
| Supports, core, cage, and endcaps: Polypropylene | |
| O-rings: EP, Viton® fluoroelastomer, or fluoropolymer encapsulated Viton fluoroelastomer (TEV) | |
| Connections: | Code 0 (2-222), or Code F (flat gasket) |
| Membrane area: | 10”: 7,000 cm2 (7.5 ft.2) |
| Particle retention: | 0.1 μm, 0.2 μmm, 0.45 μm retention ratings. |
| Greater than 99.999% particle retention at stated retention rating | |
| Maximum operating conditions: | Maximum forward differential pressure: 0.35 MPa (3.5 bar, 50 psid) at 20° C; 0.14 MPa (1.4 bar, 20 PSID) at 90° C |
| Maximum reverse differential pressure: 0.24 MPa (2.4 bar, 35 psid) at 20° C | |
| Maximum operating temperature: 90° C | |
| PSX Cartridge: | |
|---|---|
| Materials: | Membrane: Hydrophilic polysulfone |
| Supports, core, cage, and endcaps: Polypropylene | |
| O-rings: Fluoropolymer encapsulated Viton fluoroelastomer (TEV) | |
| Connections: | Code 0 (2-222), Code 6 (2-226) |
| Membrane area: | 10”: 10,000 cm2 (10.8 ft2) |
| Particle retention: | 0.1 μm, 0.2 μm, 0.45 μm retention ratings |
| Greater than 99.999% particle retention at stated retention rating | |
| Maximum operating conditions: | Maximum forward differential pressure: 0.35 MPa (3.5 bar, 50 psid) at 20° C; 0.14 MPa (1.4 bar, 20 psid) at 90°C |
| Maximum reverse differential pressure: 0.24 MPa (2.4 bar, 35 psid) at 20°C | |
| Maximum operating temperature: 90°C | |
Successfully Opted for software Updates
Published Oct 1, 2025
Data Sheet
Panelgard® PSF, PSX and PS40 Cartridge and Disposable Filters
399.1 kB
Part Numbers
| Part Number | Form Factor | Typical Flow Rate | Chemlock® Key | Maximum Temperature | Diameter | O-ring | Length | Retention Rating |
|---|---|---|---|---|---|---|---|---|
| PGSA01P01 | Cartridge | Mid flux | No | 90°C (194°F) | 83 mm | E-FKM | 10" | 1 µm |
| PGSA01P01Y | Cartridge | Mid flux | Yes | 90°C (194°F) | 83 mm | E-FKM | 10" | 1 µm |
| PGSA01PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 10" | 1 µm |
| PGSA02P01Y | Cartridge | Mid flux | Yes | 90°C (194°F) | 83 mm | E-FKM | 20" | 1 µm |
| PGSG01P01 | Cartridge | Mid flux | No | 90°C (194°F) | 83 mm | E-FKM | 10" | 0.2 µm |
| PGSG01P01Y | Cartridge | Mid flux | Yes | 90°C (194°F) | 83 mm | E-FKM | 10" | 0.2 µm |
| PGSG01PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 10" | 0.2 µm |
| PGSG01PLEY | Cartridge | Standard flux | Yes | 90°C (194°F) | 70 mm | EPDM | 10" | 0.2 µm |
| PGSG01PLV | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | FKM | 10" | 0.2 µm |
| PGSG02PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 20" | 0.2 µm |
| PGSG02PLV | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | FKM | 30" | 0.2 µm |
| PGSG03PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 30" | 0.2 µm |
| PGSG03PLV | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | FKM | 30" | 0.2 µm |
| PGSG040E1 | Cartridge | Standard flux | No | 60°C (140°F) | 67 mm | EPDM | 5" | 0.2 µm |
| PGSGF1PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 10" | 0.2 µm |
| PGSGF1PLV | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | FKM | 10" | 0.2 µm |
| PGSGF2PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 20" | 0.2 µm |
| PGSH01P01 | Cartridge | Mid flux | No | 90°C (194°F) | 83 mm | E-FKM | 10" | 0.45 µm |
| PGSH01P01Y | Cartridge | Mid flux | Yes | 90°C (194°F) | 83 mm | E-FKM | 10" | 0.45 µm |
| PGSH01PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 10" | 0.45 µm |
| PGSH01PLEY | Cartridge | Standard flux | Yes | 90°C (194°F) | 70 mm | EPDM | 10" | 0.45 µm |
| PGSH01PLV | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | FKM | 10" | 0.45 µm |
| PGSH02PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 20" | 0.45 µm |
| PGSH02PLT | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | E-FKM | 20" | 0.45 µm |
| PGSH02PLV | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | FKM | 20" | 0.45 µm |
| PGSH03PLV | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | FKM | 30" | 0.45 µm |
| PGSHF1PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 10" | 0.45 µm |
| PGSHF1PLV | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | FKM | 10" | 0.45 µm |
| PGSHF2PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 20" | 0.45 µm |
| PGSHF2PLV | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | FKM | 20" | 0.45 µm |
| PGSHF3PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 30" | 0.45 µm |
| PGSV01P01 | Cartridge | Standard flux | No | 90°C (194°F) | 83 mm | E-FKM | 10" | 0.1 µm |
| PGSV01P01Y | Cartridge | Standard flux | Yes | 90°C (194°F) | 83 mm | E-FKM | 10" | 0.1 µm |
| PGSV01PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 10" | 0.1 µm |
| PGSV01PLEY | Cartridge | Standard flux | Yes | 90°C (194°F) | 70 mm | EPDM | 10" | 0.1 µm |
| PGSV01PLV | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | FKM | 10" | 0.1 µm |
| PGSV02PE1Y | Cartridge | Mid flux | Yes | 90°C (194°F) | 83 mm | EPDM | 20" | 0.1 µm |
| PGSV02PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 20" | 0.1 µm |
| PGSV02PLV | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | FKM | 20" | 0.1 µm |
| PGSV03PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 30" | 0.1 µm |
| PGSV03PLV | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | FKM | 30" | 0.1 µm |
| PGSVF1PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 10" | 0.1 µm |
| PGSVF2PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 20" | 0.1 µm |
| PGSZ01P01 | Cartridge | Mid flux | No | 90°C (194°F) | 83 mm | E-FKM | 10" | 0.5 µm |
| PGSZ01P01Y | Cartridge | Mid flux | Yes | 90°C (194°F) | 83 mm | E-FKM | 10" | 0.5 µm |
| PGSZ01PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 10" | 0.5 µm |
| PGSZ01PLEY | Cartridge | Standard flux | Yes | 90°C (194°F) | 70 mm | EPDM | 10" | 0.5 µm |
| PGSZ01PLV | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | FKM | 10" | 0.5 µm |
| PGSZ02PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 20" | 0.5 µm |
| PGSZ02PLV | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | FKM | 20" | 0.5 µm |
| PGSZ03PLE | Cartridge | Standard flux | No | 90°C (194°F) | 70 mm | EPDM | 30" | 0.5 µm |