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Ultrapure Silicon Coating

Ultrapure Silicon is an ultra high-purity silicon coating (99.9995%) that is dense, micro-conformal, highly adherent and extremely smooth for a variety of applications. The silicon coating is deposited by a proprietary Plasma Enhanced Chemical Vapor Deposition (PECVD) process which is versatile and allows for a high degree of flexibility in coating a variety of substrate materials. It has low internal stress, therefore can be deposited in thicknesses ranging from <1 micron to 100+ microns depending on substrate material and finish.

  • 99.9995% purity
  • Dense, hard and micro-conformal
  • Excellent adhesion and compliance on a wide variety of substrates
  • Excellent surface smoothness
  • Low residual stress
  • Read More Read Less
Interested in Ultrapure Silicon Coating?

Contact your Entegris account manager or  contact us

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