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Cleaning Services


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We have state-of-the art submicron cleaning capability and microcontamination analysis equipment combined with the ability to manage logistics, spare parts, and recertification of products at one of our service centers. We have both on-site and off-site cleaning services available around the globe. Our on-site and off-site programs are customized to meet your needs.

Typical On-site an Off-site Offerings

  • Cleaning
  • Maintenance
  • Visual control
  • Inspection
  • Training
  • Analytical service support
  • End-of-life management

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Beginning-to-End Wafer Handling Solutions

300 mm wafers can hold 15,000 valuable components, and these wafers are often transported in groups of 25 units. Doing the math, a single container may be holding $750,000 worth of technology. Each of these microenvironments is designed to protect the safety, security, and purity of the wafers throughout the fabrication life cycle. Entegris provides beginning-to-end wafer handling solutions that require minimal human intervention. Here’s how they work.

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Our cleaning process and recipes are customized for both Entegris and non-Entegris products. For the semiconductor industry our cleaning support is focused on 300 mm FOSBs, 300 mm FOUPs, 200 mm shipping boxes, and reticle pods.

Outside the semiconductor industry, we clean a wide range of different materials and products for customers in the pharmaceutical, medical, automotive, and PV industries.