enable your process and reach your performance goals


As a provider of advanced specialty materials and delivery systems, we have the expertise to formulate and deliver the chemistries you need to enable your process and reach your performance goals

Entegris provides materials, material handling equipment and containers for ALD, CVD, post-CMP, post-Etch and other applications.

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Considerations for Improving 3D NAND Performance, Reliability, and Yield