Formulated chemistries and precursor materials for your most challenging process.
Expertly designed with customers' challenges in mind, Entegris tailors specially formulated chemistries and precursor materials to meet customers' technology and economic needs. We take pride in understanding customer specialty chemical requirements and applying our expertise in complex chemistry, efficiency in development and scale up capabilities, and high quality manufacturing for our customer’s success. We excel at determining synthesis routes quickly for potential solutions. We provide proactive supply chain management and excellence in process engineering. We have advanced quality and purity systems throughout our development and production.
We produce consistent and high-purity precursors for use in Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), and related technologies. Our portfolio includes complexes containing cyclopentadienyl, amide, alkoxide, carbonyl, acetylacetonate ligands, and many other metal-ligand complexes.
The RegenSi® family of solutions provides an all wet method for reclaiming or recycling used test wafers. By removing dielectric and metal layers without the need for a subsequent CMP process, the RegenSi family increases the effective lifetime each test wafer - thereby reducing the customers test wafer spend.