With a footprint that is smaller than most comparable valves, our valves offer reliable performance and easy serviceability in high-purity, corrosive chemical applications. With no exposed metal hardware, the valve is completely sealed and protected from harsh chemical environments. The high-temperature version is rated to 200°C fluid. Available in a number of 1/4" and 1/2", 2-way and 3-way, manual and pneumatic configurations to meet all of your fluid system needs.
Whether a subassembly or an entire system, Entegris can fabricate your unique product utilizing plastic machining, welding, bonding and/or general fabrication. Our experience in fluid handling and with PFA will result in a strong, durable, chemically-resistant solution that meets your needs.
Ideal where space is limited, our Galtek® SG Series valves set the standard for small valves with all-PFA wetted surfaces used in CMP and high purity semiconductor fluid handling applications. These 1/4" orifice valves are available in 2-way and 3-way, manual and pneumatic configurations.
This innovatively designed 3-way valve has the ports located on one plane so they may be easily stacked side by side, significantly reducing footprint in your fluid handling system. All wetted surfaces are PFA and PTFE providing chemical resistance suitable for use with high purity chemicals and DI water.
Our Magnaflo® plug valve can be used in the same applications as traditional ball valves. This unique valve couples corrosion resistance and a straight-through flow path, offering a high flow, durable solution to aggressive chemical. Unlike metal vaves, the Magnaflo valve's all polymer exterior is also corrosion resistant.
Accuflo™ metering and needle valves are all PFA/PTFE construction, offering unrivaled durability in your corrosive environments. Configured as a manual panel-mount valve, Accuflo valves provide enhanced control of sophisticated chemicals in semiconductor and other markets requiring adjusted flow.
Corrosion-resistant Galtek® check valves reduce contamination potential in your high-purity chemical applications and provide clean delivery of sophisticated chemicals. An o-ring-free design provides a simple, clean, compact valve with a high flow rate and increased reliability. We offer a full range of 1/4", 1/2", 3/4" and 1" orifice check valves with a variety of industry standard end connections including Flaretek® and PureBond®.