Cleaning Services

For cleaning, we have state-of-the art submicron cleaning capability and microcontamination analysis equipment combined with the ability to manage logistics, spare parts and recertification of products at one of our service centers. We have both on-site and off-site cleaning services available around the globe. Our on-site and off-site programs are customized to meet your needs.

Typical On-site and Off-site Offerings
  • Cleaning
  • Maintenance
  • Visual control
  • Inspection
  • Training
  • Analytical service support
  • End-of-life management

Interested in Cleaning Services?

Contact your account representative to learn more.

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Our cleaning process and recipes are customized for both Entegris and non-Entegris products. For the semiconductor industry our cleaning support is focused on: 300 mm FOSBs, 300 mm FOUPs, 200 mm shipping boxes and reticle pods.

Outside the semiconductor industry, we clean a wide range of different materials and products for customers in the pharmaceutical, medical, automotive and PV industries.



One of the world’s largest suppliers of semiconductor equipment wanted to study copper process effects on FOUP cleaning. They turned to Entegris for a partnership arrangement. Entegris’ FOUPs were integrated in the fab and managed by Entegris on-site personnel. FOUP life and interoperability are also under study. The program takes advantage of Entegris’s extensive laboratory testing facilities to help determine contamination issues. By partnering with Entegris, this manufacturer will ultimately benefit with an increased understanding of the interaction of advanced processes and FOUP cleaning.

SMIF Pod and Wafer Carriers

A major European wafer processor needed to increase productivity and ROI in the fab. Entegris responded with a dual program that began by replacing outdated wafer carriers with Entegris high-performance SMIF pods and advanced wafer transport carriers, and continued with an on-site team of experts to maintain Entegris products, track them through the fab and guarantee 100% availability. By outsourcing to Entegris, the manufacturer adopted a state-of-the-art wafer handling program that ensures sustainable quality while lowering fixed costs.