Speaker(s)
- Carlo Waldfried | Director of Innovation, Entegris
Join Us | Featured Poster
Yttrium Fluoride Coatings
Monday, June 27 at 5:45 PM
Presented by: Carlo Waldfried, Director of Innovation, Entegris
At the conference, Carlo Waldfried, director of innovation, will present a poster highlighting a unique method to produce ALD fluoride coatings by first producing thin film ALD yttrium-oxide (Y2O3) coatings and then converting the Y2O3 into yttrium fluoride (YF3) and/or yttrium oxyfluoride (YOF) in a separate subsequent chemical vapor process.
Products / Solutions
Ideal for semiconductor, data storage, aerospace, medical device, plastic injection molding and industrial applications
With our materials science and coating solutions, we help customers increase the durability and extend the lifetime of their components while reducing maintenance and operational costs.
Semiconductor processing at advanced nodes requires extreme levels of cleanliness to minimize the risk of yield loss associated with submicroscopic contaminants. 3D structures pose additional demands as the number of lengthy processing steps increases.