Event Details
Entegris is a leading provider of specialty gas filtration, purification, storage, and delivery systems. Our solutions help achieve safe, contaminant-free delivery throughout the entire gas supply chain, from manufacturing through transportation, storage, and dispense.
Featured Presentation
October 22 | 4:50 – 5:20 p.m.
CONTAMINATION CONTROL CONSIDERATIONS FOR SOLID PRECURSOR DELIVERY SYSTEMS
Speaker
Virendra Warke, Ph.D., Director, R&D and Engineering, Entegris
Employee Spotlight
Congratulations to Sarah Vogt, Entegris R&D Manager, on her participation in the IRDS Gas Team meeting at ESGS. This collaboration session provides critical input on future electronic gas standards for the semiconductor industry. We look forward to helping steer chipmakers towards better options for high-purity, high-performance gases and gas delivery systems. A summary of the current roadmap and new findings will be shared at the conference by Andreas Neuber, Director of Environmental Services at Applied Materials, on behalf of the committee.