Clean Gas Delivery


Bowling for Contaminants

  • Summary

Semiconductor device yields have long been impacted by contamination. As process nodes continue to shrink to 5 nm and features become more complex — pushing the manufacturing challenges of chip designs to new limits — the sensitivity to contamination during manufac­turing processes has increased significantly.

To meet the needs of these applications, gas purity must extend through the full supply chain to prevent process excursions and improve device performance and reliability.