Clean Gas Delivery
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Semiconductor device yields have long been impacted by contamination. As process nodes continue to shrink to 5 nm and features become more complex — pushing the manufacturing challenges of chip designs to new limits — the sensitivity to contamination during manufacturing processes has increased significantly.
To meet the needs of these applications, gas purity must extend through the full supply chain to prevent process excursions and improve device performance and reliability.
Featured White Paper
Eliminating Unwanted Oxygen: Preventing Device Failure at the Source
This white paper highlights the numbers, processes, science, and solutions that can eliminate oxygen from essential film deposition processes during advanced logic, LED, and OLED electronic device component manufacturing. It also explains, where possible, how using purification products designed to remove oxygen containing contaminants provides an effective first-line defense against device failure.
Featured White Paper
Bowling for Contaminants: The New Science of Gas Purification
This white paper explains the importance of applying purification science to managing the gas supply purity from the source throughout all the wafer process steps to ensure the highest device yield.
Featured Pictogram
Clean Gas Delivery
Smaller and more complex semiconductors are vulnerable to smaller and more diverse contaminants. Meanwhile, the gas supply chain has the potential to introduce contaminants throughout manufacturing, transportation, and storage. Learn how suppliers and chipmakers can mitigate contaminants and improve yields using filters, purifiers, and safe delivery systems.
Pictogram
Advanced Gas Purification
Pictorial of the growing importance of process gas purification in manufacturing geometrically complex semiconductor devices. View how advanced purification can address multiple trace contaminants in the gas supply to achieve and maintain the purity baseline.
Featured Video
The History of Gas Filtration
Rob Zeller, research engineer at Entegris, discusses the history of gas filtration, how gas filters work, and how gas filters were introduced to chip manufacturing.
For this application, gas filters help enforce stringent cleanliness specifications to maintain productivity and yield. Runtime: 8:32
Featured Blog
Targeted Removal: Beyond the Coffee Filter Analogy
A steaming cup of coffee shouldn’t usually be associated with semiconductor materials (in other words, don’t spill a cup of coffee on your laptop). That said, semiconductor manufacturing relies on some of the same simple filtration methods involved in making a cup of coffee.
In our recent blog, learn how Entegris goes beyond this analogy to improve semiconductor process purity. We’ll leave the choice of beverage to you.
Gas filters are integral in preventing particles from reaching a wafer surface. Removing particles as small as 0.0003 𝝁m, gas filters are an effective tool for reducing wafer defects, however, they don’t last forever and can be overlooked as a root cause of a process excursion. Learn more about how implementing a preventive maintenance strategy for gas filters can improve your process performance.
Featured Brochure
BrochureProduct Solutions
Our innovative gas microcontamination control products are built with the latest technology. Be prepared for the challenges of tomorrow’s advanced devices, photovoltaics, life sciences and lithium ion batteries with our gas purifier and purification solutions.
Entegris ultrapure gas filtration products offer 0.003 micron particle filtration for ultrapure gas applications. Wafergard® gas filters enable higher process gas throughput while reducing the overall gas box footprint.
Entegris gas diffusers are compatible with most system designs for easy installation or retrofit into load lock chambers, cooling chambers, transfer chambers and process chambers.