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The conference is designed for executives, buyers, product managers, and strategic planners from the electronic gases value chain including end-users, producers, and equipment suppliers. The conference features knowledgeable experts in the industry, who understand the key developments and challenges unique to this market.
Entegris is a leading provider of specialty gas filtration, purification, storage, and delivery systems. Our solutions help achieve safe, contaminant-free delivery throughout the entire gas supply chain, from manufacturing through transportation, storage, and dispense. Listen to our presentations and speak with our experts about a comprehensive clean gas delivery strategy for your organization.
Featured Presentations
ENABLING MOLYBDENUM IN THE HVM ECOSYSTEM
November 4 | 1:20 – 1:50 p.m.
In response to the semiconductor industry's push for smaller, higher-performing devices, molybdenum (Mo) is emerging as a key material—especially in replacing tungsten for word lines in 3D NAND. While Mo offers lower resistance and barrierless integration, its adoption faces challenges due to the corrosive nature of solid halide-based precursors and the complexity of delivering ultrapure materials from factory to fab. This presentation explores the technical and logistical hurdles in scaling Mo precursor delivery and outlines innovative solutions needed to meet the industry's evolving performance and economic demands.
Speaker:
Joseph Rivers
Senior Director, Deposition
ADVANDED METROLOGY FOR THE DEVELOPMENT AND MANUFACTURING OF CRITICAL FILTRATION AND PURIFICATION PRODUCTS
November 6 | 3:40 – 4:00 p.m.
As semiconductor technology advances beyond the 2 nm node, increasing process sensitivity and the introduction of new materials demand ultra-high purity and tighter contamination control. This presentation highlights the importance of a “total wafer environment” strategy to manage defects and maintain yield, focusing on metrology and filtration solutions for wet etch and clean processes that ensure stability and cleanliness across critical chemistries.
Speaker:
Thomas Phely-Bobin
VP, Engineering, R&D, and Applications, Liquid Microcontamination Control
Panel: Forward Looking Collaborative Inspection, Metrology & Analytical Solutions in Angstrom Era
November 4 | 3:35 – 3:40 p.m.
Opening Sessions Remarks:
Sarah Vogt
Director, ER&D Gas Purification
Event Related Content
Learn how Entegris helps companies improve semiconductor device yields by offering gas purity solutions for the entire supply chain.