New Facility for High-Purity Coatings Technology Supports Europe's Semiconductor, Industrial and Plastics Industries


MOIRANS, France, September 19, 2012 – Entegris, Inc. opened a new facility to provide specialized silicon and diamond-like coatings to support Europe's semiconductor, industrial and plastics industries. 

Located in the Techlid economic hub in Lyon, France near the heart of Europe's center for nanotechnology activity and plastics production, the new Entegris facility expands the Company's market leading capabilities in the U.S. and Asia for high-purity Silicon and Diamond-like Carbon (UltraC™) families of coatings. Entegris Silicon coatings are high-purity, dense and micro-conformal coatings with very low residual stress. The Company's UltraC coatings are extremely smooth, highly lubricious, and are harder than tool steel and chrome. Both families of coatings are highly resistant to corrosion. 

To manufacture these coatings, the facility will use a proprietary Plasma Enhanced Chemical Vapor Deposition (PECVD) process that ensures no change to the hardness of the substrate, even to those processed at low temperatures. These coatings are ideal for a variety of high purity processes and components for such applications in plastic injection molding, metal forming, materials handling, semiconductor processing chambers, and biomedical industries. 

The new facility will also house the Company's European office to support the sale of its market-leading line of POCO graphite and SUPERSiC® silicon carbide products. For information, please contact Guillaume Charlet, Production and Facility Manager at +33 4 72 52 00 40. 

Entegris provides a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in semiconductor and other high-tech industries. Entegris is ISO 9001 certified and has manufacturing, customer service or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at