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Fluid Management


As mega-trends, such as artificial intelligence and robotics, smart homes and smart cars, and the Internet of things evolve to meet growing needs for speed, scale, and reliability, they force integrated circuit (IC) manufacturers to increase processor power efficiency and memory size. To accomplish this, features sizes are shrinking, process complexity is increasing, and sensitivity to contamination and defects have a greater impact on device performance.

At Entegris, we understand the unique challenges of clean chemical delivery and work with customers to develop and optimize purity in fluid delivery systems. From fast and accurate measurement control, to advanced particle characterization, to safe and efficient fluid handling, we provide contamination-controlled solutions at each step throughout chemical manufacture to point of use. We can help you maintain chemical purity throughout the fluid path to achieve better device performance and increase yield.

Recent Event

Reducing Contamination Points in Clean Chemical Delivery from Manufacture through Point of Use

Reducing Contamination Points in Clean Chemical Delivery from Manufacture through Point of Use

This paper takes a closer look at ways to more comprehensively meet increasing purity specifications throughout chemical and device manufacturing.

Featured Insights

Clean Chemical Delivery in Semiconductor Manufacturing

As logic devices go to smaller line widths, 3D NAND architectures increase layers, and DRAM memory density increases, sensitivity to contamination and defects have a greater impact on device performance. To achieve optimum wafer yield and reliability, the microelectronics industry needs to address the increased materials consumption requirements and material purity challenges from chemical manufacture to point of use.

Glass Container Alternatives

Glass bottles were the standard for storing, transporting, and dispensing chemistries for semiconductor device manufacturing. increasing concern over safety as fabs become larger and more automated, has sparked the industry to develop glass container alternatives.

Choosing the Right Chemical Container

To ensure a consistent chemical supply that meets the highest purity requirements of the semiconductor industry, look to our end-to-end chemical handling, transport, and delivery system solutions that satisfy regulatory requirements for purity and safety.

Clean, Photochemical Delivery in Advanced Lithography

The solution to maintaining a safe and contamination-controlled chemical delivery environment in the fab is to seek out simplified single-sourced chemical packaging, filtration, and handling products that will increase product yield and reduce financial loss. While it may seem insignificant, the right clean chemical delivery pump can make or break the entire chain. 

Interested in our fluid management solutions?

Interested in our fluid management solutions?

Need more detail or local office information?

Need more detail or local office information?

Zero Defects Newsletter

Zero Defects Newsletter

Zero Defects Newsletter