New material introduction always introduces risks to semiconductor manufacturing - even in components such as tubing and valves. Manufacturers have moved away from stainless steel valves due to the need for increased material and chemical purity. Replacing stainless steel with PFA valves and tubing can deliver increased purity, but at the cost of increased safety risks. PFA tubing can generate and accumulate static charge, and the ensuing electrostatic discharge (ESD) can damage both wafers and manufacturing equipment.
To mitigate the increased risks of ESD, Entegris has developed a continuously conductive PFA system of tubing, valves, and fittings. This system collects the charge buildup from the media and the fluid handling system and allows an uninterrupted dissipation path to ground. This lets manufacturers benefit from the purity of PFA tubing without any risk to production.
Preventing ESD in your process
Entegris conductive PFA fluid system prevents accidents, downtime, and equipment failures while preserving device yield and performance. Runtime: 01:29
Featured White Paper
A Shock to the System: Why Electrostatic Discharge is Bad for Business
This paper looks at new electrostatic discharge challenges posed by introducing PFA-based fluoropolymer chemical delivery systems into the manufacturing environment, and offers innovative approaches to mitigate them.
Featured Pictogram
A Shock to the System: Defending Against Dangerous Electrostatic Discharge
Pictorial of the dangers of static charge accumulation and harmful electrostatic discharge in PFA fluid handling systems, and Entegris' solution to overcome the many challenges presented by electrostatic hazards.
Featured Webinar
ESD Challenges in Fluid Handling Systems
In this webinar, you will learn:
- Why the industry is moving away from stainless steel to PFA materials for transporting process fluids
- What impact this move is having on handling the high-purity materials required in advanced node technology
- What the safety risks are of static charge generation, accumulation, and harmful ESD
- How to defend against dangerous ESD in fluid handling systems
Listen as Dave Kemkes, senior product marketing manager, and Rick Lindblom, director of fluid handling product marketing, discuss these topics and introduce our new ESD solutions.
Featured Video
Electrostatic Dissipative Fluoropolymer Tubing and Fittings
In this video, Mark Caulfield, senior technology manager, explains the dangers of static charge buildup and harmful electrostatic discharge in PFA fluid handling systems, and presents innovative solutions being developed to overcome the many challenges presented by electrostatic hazards. Runtime: 03:40
Featured Brochure
Brochure
Product Solutions
Fully Conductive PFA System
For advanced-node manufacturers, the risk posed by electrostatic discharge has become amplified with the use of flammable solvents and other nonconductive semiconductor chemistries in fluoropolymer systems. To address the semiconductor industry’s need to remove charge from the process chemicals and control contamination, we introduce a fully conductive system to overcome the many challenges presented by electrostatic hazards including reduced safety and financial risk. FluoroLine® Plus ESD tubing, ESD Valves, and PrimeLock® ESD fittings are designed from a conductive PFA material that combines high conductivity with high purity and meets the stringent safety and chemical cleanliness requirements semiconductor manufacturers demand.
FluoroLine® Plus ESD Tubing is an ideal solution where you need to continuously remove charge from flammable solvents and other nonconductive semiconductor media. The conductive PFA stripes on the tube ID are made with proprietary manufacturing equipment and processes. This innovative solution reduces the accumulated electrostatic charge from both the media flowing through the tubing as well as charge that might build up inside the tube, mitigating safety risks.
We have supplied innovative connection technology into the high-purity chemical handling markets for more than three decades. Leveraging our premier PrimeLock tube fitting platform of clean, robust, very easy to assemble fittings, we now bring ESD protection closer to the wafer. These ultrapure, conductive PFA fittings direct charge buildup from the media and more effectively remove electrostatic charge from the entire flow path.
Integra® Plus WS ESD Valves safely remove charge from flammable solvents and other nonconductive semiconductor chemistries. The weir-style valve body design streamlines the flow path and eliminates dead volume; ideal in CMP slurry and bulk chemical applications, pneumatic actuation.
Our CRE4 Series valves are available for high-purity chemical handling in line sizes 3/8" and smaller. Our pneumatic normally closed tube valve has a compact, modular design that enables manifold customization.
Our CRE8 Series valves are available for low- to medium-flow (1.8 – 3.4 Cv) corrosive chemical and ultrapure solvent applications. The pneumatic 2-way valve has a compact, modular design that enables manifold customization.
Specially designed straps provide a secure grounding connection point to the ESD fittings, ensuring an effective charge dissipation path from the tube ID to equipment or facility ground. Made from durable, corrosion-resistant stainless steel, the grounding straps are designed for use with our PrimeLock ESD fittings, sizes 1/4" to 1 1/4". A hex configuration is available for use with the PrimeLock ESD straight unions, and a round configuration is available for use with PrimeLock ESD elbow and tee unions.
Specially designed straps provide a secure grounding connection point to the ESD valves, ensuring an effective charge dissipation path from the tube ID to equipment or facility ground. Made from durable, corrosion-resistant stainless steel, the grounding straps are designed for use with our CRE4 and CRE8 series valves.