Challenges with Glass
For many years, glass bottles were the de facto standard for storing, transporting, and dispensing chemistries for semiconductor device manufacturing. As device feature sizes become finer, new root causes for device defects are being traced to glass bottles. That, combined with increasing concern over safety as fabs become larger and more automated, has sparked the industry to develop glass container alternatives.
Until now, attempts to replace glass with plastic came up short. Only certain plastics could be used, and the cost of necessary and additional packaging made them unrealistic. Renewed efforts, driven primarily by device manufacturers in Asia, resulted in a viable solution that is ready to be implemented worldwide
Entegris’ NOWPak liner-based bottle system features a PTFE/PFA liner that seals it completely, leading to less chemical waste through spillage or evaporation. Lighter, stronger, and unbreakable, this bottle system is a safer alternative to glass, and is less costly to ship.
Featured White Paper
Exploring Glass Container Alternatives for Clean Chemical Delivery
This paper looks at the challenges posed by relying on traditional glass bottles to pack, store, ship, and deliver clean process chemicals, alternatives that have been explored, and a viable solution to these challenges.
Featured Video
Clean Chemical Delivery: Chemical Movement
Dongyun Lee explains the growing importance of clean, safe chemical delivery to and throughout the semiconductor fab. As an alternative to traditional glass bottles, he introduces our shatter-resistant, ESB-7™ bottle system that is cleaner, safer, and more reliable, which helps reduce costly on-wafer defects and overall cost of ownership. Runtime: 02:44
Featured Pictogram
Entegris NOWPak® Liner-based Bottle Systems: A Safe Alternative to Glass Bottles
Glass bottles have been used ubiquitously for chemical delivery and storage for decades. However, they present problems in safety and integrity of the chemistries they contain, particularly for semiconductor fabs manufacturing modern devices. Entegris’ NOWPak® liner-based bottle systems provide a safe, cost-effective alternative to glass.
Featured Products
Chemicals can be susceptible to particle contamination that may be introduced during chemical transport or transfer from bulk chemical containers to smaller drums or transportation packs. Avoid this risk with our clean, contamination-controlled solutions. NOWPak® liner based systems bottles, canisters, and closures maintain chemical purity and help ensure safe transport, containment, and dispense of valuable, ultraclean process fluids.
Transport vessels and storage tanks
Whether transporting, storing or dispensing chemical in bulk or to the point of use, our FluoroPure® chemical containers, intermediate bulk containers, and Sentry® quick connect systemsare designed to maintain chemical integrity and not contaminate your process.
Rugged and efficient liner based systems
Chemicals can be susceptible to particle contamination that may be introduced during chemical transport or transfer from bulk chemical containers to smaller drums or transportation packs. Avoid this risk with our clean, contamination-controlled solutions. NOWPak® liner based systems bottles, canisters, and closures maintain chemical purity and help ensure safe transport, containment, and dispense of valuable, ultraclean process fluids.
Clean Fluid Management
Ultraclean PFA tubing
As chemical sits in miles of tubing or in re-circulation loops, it is vulnerable to shedding particles. Protect your valuable chemical from particle contamination with our FluoroLine® ultraclean PFA tubing, which has the lowest total metal extractables and the least amount of surface contamination.
Advanced Membrane Technology
Sophisticated liquid filtration
Filter membrane technology has advanced to enable sub-10 nm particle removal, which is vital to improving overall operating efficiency and enabling leading-edge technologies. Oktolex™ membrane technology tailors the Impact® 8G filter membrane to target specific contaminants and achieve maximum removal efficiency, which helps to maintain a clean chemical environment.
Through novel polymer design, diverse membrane manufacturing techniques, and advanced cleaning technologies, our Torrento® X, Guardian™ PS, and QuickChange® NX filter solutions enable you to tailor your contamination control based on the chemicals used, and the conditions required.
Effectively remove metal contaminants
Cleaning process tools and components like photoresist dispense pumps can reduce the impact of metallic contamination. At advanced logic nodes, gel defects and microbridged circuits are detrimental to device yield. The use of our Purasol™ SP/SN solvent purifiers can be especially effective at removing both dissolved and colloidal metal contaminants from variety of ultrapure, polar, and non-polar solvents used in photoresist applications.