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Particle Characterization
High Resolution Particle Size and Count Systems
AccuSizer® systems are based on our unique single particle optical sizing (SPOS) technology. The AccuSizer SPOS system is both a liquid particle counter and a sophisticated particle size analyzer. Particles are sized and counted one at a time as they flow through a sensor inspection zone. This creates high accuracy, high resolution particle size distributions as well as concentration data in particles/mL.
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Each system includes an SPOS sensor, a pulse height analyzer (or counter), and fluidics to transport the sample through the sensor. Many systems include automatic dilution to adjust the concentration to the optimal range for measurement. A range of both laboratory and online systems are configured to specific application requirements.
Our Nicomp® Nano dynamic light scattering (DLS) systems measure size and zeta potential of submicron particles. Designed for sensitivity, the Nicomp system algorithm is uniquely capable of determining when multiple peaks are present and can resolve peaks closer than any other DLS system. Advanced options including multi-angle goniometer, autodilution, auto-sampling, and online systems make the Nicomp system the best choice for many samples.
Featured White Paper
Particle Size Analysis Overview
New to particle size analysis? This paper reviews different analytical techniques for particle size analysis, including types of distributions, laboratory versus online systems, and sample result comparisons. It is intended to help scientists new to particle size analysis understand each technique’s various strengths and weaknesses in order to select the proper technique for their samples.
Featured Videos
Clean Chemical Delivery: CMP Delivery Systems with Kerry Hasapidis, SME
Kerry Hasapidis explains how Entegris combines the AccuSizer® Mini SPOS system with advanced filtration to identify and remove large particle counts from the CMP slurry stream, helping customers deliver consistent slurry to the polishing tool and improve their yield. Runtime: 01:59
View the Accusizer SPOS System
Video introduction of our AccuSizer® SPOS systems comprising high resolution and high concentration particle counters that accurately determine particle size and counts at the tail end of your distributions.
View the Nicomp DLS system
Video introduction of our Nicomp® DLS systems that use dynamic light scattering (DLS) technology to provide high sensitivity, high resolution size, and zeta potential of sub-micron particles.
Solutions Brochures & Data Sheets
We have a comprehensive library of reference materials detailing how to apply our advanced particle count and size analyzers to solve a range of laboratory and process applications in semiconductor, life sciences, and other industries. Here is a sampling of our high-performance solutions.
Detailed overview of our AccuSizer® A7000 SPOS systems designed as liquid particle counters for contamination applications or as sophisticated particle size analyzers of suspensions.
Product Solutions
We offer advanced particle count and size analyzers that provide high resolution and accuracy in CMP slurries and other suspensions. Our Particle Characterization solutions enable customers to perform particle size analysis both in the laboratory and online, in real time, directly in the fluid stream process.
Choosing the best particle analyzer for your samples is an application specific search. Instrument type, configuration, and reporting options all influence this decision. Search our reference materials to match our systems to your specific requirements.
If you are not already an expert in DLS technology, understanding how to prepare samples, make good measurements, and interpret the data can be challenging. Our collection of application and technical notes can help guide you to choosing the right instrument to generate the best results.