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  • Brand Name
  • Chemistry
Clean, cost-effective filtration of non-outgassing, aqueous, acid and base chemistries or advanced solvent applications
Brand Name
  • Fluorogard®
Chemistry
  • Aggressive Acids
  • Aggressive Bases
  • Solvent
Feature Size (Layer)
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
  • Bulk
Filtration of copper deposition solutions
Brand Name
  • Etchgard™
Chemistry
  • Dilute Acids
  • Dilute Bases
  • Deposition
Feature Size (Layer)
  • >90 nm
Installation Point
  • Point of Tool
Best-in-class linear filtration technology
Brand Name
  • FlowPlane™
Chemistry
  • Aggressive Acids
  • Aggressive Bases
  • Solvent
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
Installation Point
  • Point of Tool
Clean, cost-effective filtration of non-outgassing, aqueous, acid and base chemistries or advanced solvent applications
Brand Name
  • Fluorogard®
Chemistry
  • Aggressive Acids
  • Aggressive Bases
  • Solvent
Feature Size (Layer)
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
  • Bulk
Point of tool resist stripper filter
Brand Name
  • Fluorogard®
Chemistry
  • Resist Stripping
Feature Size (Layer)
  • >90 nm
Installation Point
  • Point of Tool
Advanced, ultra-clean filtration of low-temperature, dilute acids and bases.
Brand Name
  • Guardian™
Chemistry
  • Dilute Acids
  • Dilute Bases
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
Clean filtration of low-temperature, dilute bases
Brand Name
  • Guardian™
Chemistry
  • Dilute Acids
  • Dilute Bases
Feature Size (Layer)
  • >90 nm
Installation Point
  • Point of Tool
Small volume, point of dispense acid, base and solvent filter
Brand Name
  • Fluoroline™
Chemistry
  • Photochemical
  • Solvent
  • Aggressive Acids
  • Aggressive Bases
  • Dilute Acids
  • Dilute Bases
Feature Size (Layer)
  • >90 nm
Installation Point
  • Point of Dispense
Best in class, low-temperature dilute acid filter
Brand Name
  • Intercept®
Chemistry
  • Dilute Acids
Feature Size (Layer)
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
Pre-filtration device to prevent wafer shards from damaging downstream valves, dispense systems, final filters and other chemical analysis devices.
Brand Name
  • Pumpgard™
Chemistry
  • Aggressive Acids
  • Aggressive Bases
  • Solvent
  • Resist Stripper
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
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