InVue® CR288 Concentration Monitors
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Inlet/Outlet Port Connection: For PrimeLock®, Pillar®, and other options not shown here, please contact Entegris.
Software Download
Windows®-based interface for user setup, calibration, monitoring, and data logging of up to four sensors.
System Requirements: Windows 98 or higher, 128+MB RAM, CD-ROM.
Current software version 4.7.0
Previous software version 4.5.1
The InVue CR288 concentration monitor utilizes in-situ, real-time refractive index technology to monitor up to four in-line measurement points for wet chemistry applications such as:
- BEOL and FEOL cleaning
- Chemical mechanical planarization (CMP)
- Electroplating
- Photolithography
- Biopharmaceutical manufacturing
Specifications
Dimensions | |||
Port Connection | A | B | C |
1/4" Flaretek® | 3.40" (86.4 mm) | 3.39" (86.1 mm) | 0.71" (18.0 mm) |
3/8" Flaretek | 3.62" (91.9 mm) | 3.59" (91.2 mm) | 0.81" (20.6 mm) |
1/2" Flaretek | 3.78" (96.0 mm) | 3.75" (95.2 mm) | 0.89" (22.6 mm) |
3/4" Flaretek | 4.33" (110.0 mm) | 3.93" (99.8 mm) | 0.98" (24.9 mm) |
The following performance data is based on operation within the calibrated range, ±0.3% of the refractive index calibration point or ±0.3% of concentration4
Criteria | Value |
Refractive index accuracy (Refractive Index Units, RIU): | ±2 × 10-4 |
Refractive index repeatability: | 2.5 × 10-5 |
Refractive index resolution: | 1.0 × 10-5 |
Concentration accuracy: | ±0.2 wt%3 |
Concentration repeatability: | ±0.025 wt% |
Concentration resolution: | Chemical dependent 0.01 wt% or better |
Response time: | 1.2 sec standard, no rolling averaging enabled, rolling averaging is user-configurable |
3Based on measuring ethylene glycol at 0.345 bar (5 psig) with a maximum variation of 0.017 bar (±0.25 psig) and a temperature of 20°C ±0.1°C (68°F ±0.18°F).
4The fluid temperature compensation coefficient (TCC) is shipped factory set using room temperature DI water.
Sensor materials of construction: | Flow cell | Modified PTFE1 | |
Optical window | Semiconductor-grade Sapphire1 | ||
Cable | Polypropylene (PP) | ||
Bonnet | Polypropylene (PP) | ||
Mounting plate | PVDF | ||
Sensor operating parameters: | Fluid pressure rating | 0 – 5.5 bar (0 – 80 psig) | |
Fluid temperature rating | 5°C- 50°C (41°F -122°F) | ||
Process fluid index of refraction range | 1.28000 to 1.40000 2 | ||
DDU operating parameters: | Power requirements | 24V (DC) ±5%, 0.5A minimum | |
Included power supply input requirements | 110 / 240 VAC, 50/60 ±3 Hz | ||
Serial port | RS-232 | ||
Analog output | 4 –20 mA for temperature and concentration; up to four sensors per DDU | ||
Electrical connector | IP67-compliant, 12-pole, 1 A , panel-mount type | ||
Ambient operating environment | Room temperature — 25°C ±5°C (77°F ±9°F) | ||
Machine interface: | 4-20 mA RS-232 | Analog, scalable resolution | |
Digital over serial3 | |||
Software: | Windows-based interface for user setup, calibration, monitoring, and data logging of up to four sensors. Current software version 4.7.0 |
1Wetted components
2For fluids with an RI above 1.40000, please consult your local Entegris support person.
3Full digital protocol available to replicate service software 288 connect
Successfully Opted for software Updates
Click the screens below to view the respective InVue Concentration Monitor video.
Videos include:
- InVue Concentration Monitors - Semiconductor Applications
- InVue Concentration Monitors - Bioprocess Applications
Concentration Monitors - Index of Refraction Technology
Concentration Monitors - Semiconductor Applications
Part Number | Type | Electrical Connection | Number of Flow Cells | Inlet Port Size | Inlet Port Type | Outlet Port Size | Outlet Port Type |
---|---|---|---|---|---|---|---|
CPAAALAXX12F12F | Concentration monitor kit | Terminal block | 1 | 3/4" | Flaretek® | 3/4" | Flaretek® |
CPAAALAXX4F4F | Concentration monitor kit | Terminal block | 1 | 1/4" | Flaretek® | 1/4" | Flaretek® |
CPAAALAXX8F8F | Concentration monitor kit | Terminal block | 1 | 1/2" | Flaretek® | 1/2" | Flaretek® |
CPAAALBXX12F12F | Concentration monitor kit | Terminal block | 2 | 3/4" | Flaretek® | 3/4" | Flaretek® |
CPAAALBXX12W12W | Concentration monitor kit | Terminal block | 2 | 3/4" | Super 300 Type Pillar® | 3/4" | Super 300 Type Pillar® |
CPAAALBXX8F8F | Concentration monitor kit | Terminal block | 2 | 1/2" | Flaretek® | 1/2" | Flaretek® |
CPAAALDXX6F6F | Concentration monitor kit | Terminal block | 4 | 3/8" | Flaretek® | 3/8" | Flaretek® |
CPAAALPXX12F12F | Flow cell | Interconnecting cable | 1 | 3/4" | Flaretek® | 3/4" | Flaretek® |
CPAAALPXX4F4F | Flow cell | Interconnecting cable | 1 | 1/4" | Flaretek® | 1/4" | Flaretek® |
CPAAALPXX6F6F | Flow cell | Interconnecting cable | 1 | 3/8" | Flaretek® | 3/8" | Flaretek® |
CPAAALPXX8F8F | Flow cell | Interconnecting cable | 1 | 1/2" | Flaretek® | 1/2" | Flaretek® |
CPAAANPXXCBL4 | Sensor cable | Interconnecting cable | N/A | N/A | N/A | N/A | N/A |
CPAAANPXXDDU3 | Digital display unit | Terminal block | N/A | N/A | N/A | N/A | N/A |
CPAAANPXXPWR1 | Power supply | 3-prong wall AC | N/A | N/A | N/A | N/A | N/A |
CPAAANPXXSMA | RS232 cable and software | USB to DSUB | N/A | N/A | N/A | N/A | N/A |
CPAAANPXXUSB1 | RS232 cable | USB to DSUB | N/A | N/A | N/A | N/A | N/A |
Inlet/Outlet Port Connection: For PrimeLock®, Pillar®, and other options not shown here, please contact Entegris.
Software Download
Windows®-based interface for user setup, calibration, monitoring, and data logging of up to four sensors.
System Requirements: Windows 98 or higher, 128+MB RAM, CD-ROM.
Current software version 4.7.0
Previous software version 4.5.1