50 Years Strong!

Nov. 22, 2017

Corporate Fact Sheet
Narrow Your Selection
  • CAS #
  • Chemical Formula
  • Element
  • Industry
  • Process
UltraPur™ HfCl4 is a precursor used in the ALD process
CAS #
  • 13499-05-3
Chemical Formula
  • HfCl4
Element
  • Hafnium tetrachloride
Industry
  • Semiconductor
UltraPur™ TEOS is a liquid precursor used in CVD process
CAS #
  • 78-10-4
Chemical Formula
  • SiC8H20O4
Element
  • Tetraethylorthosilicate
Industry
  • Semiconductor
4MS
UltraPur™ 4MS is a precursor used in the chemical vapor deposition of low-k inter-metal dielectric films for sub-0.25µm IC interconnects.
CAS #
  • 75-76-3
Chemical Formula
  • Si(CH3)4
Element
  • Tetramethylsilane
Industry
  • Semiconductor
HCDS HP is a liquid precursor used in CVD, ALD and LPCVD SiN and SSPD processes
CAS #
  • 13465-77-5
Chemical Formula
  • Cl6Si2
Element
  • Hexachlorodisilane
Industry
  • Semiconductor
TEB
UltraPur™ TEB is a precursor used in CVD process.
CAS #
  • 150-46-9
Chemical Formula
  • C6H15BO3
Element
  • Triethylborate
Industry
  • Semiconductor
UltraPur™ TEB is an organic boron ester compound widely used as a boron source in the deposition of doped silicate glass in a low pressure and plasma-enhanced CVD process.
CAS #
  • 273723-18-5
Chemical Formula
  • C6H15BO3
Element
  • 11B enriched triethylborate
Industry
  • Semiconductor
UltraPur™ TEPO is a liquid precursor used in the deposition of doped silicate glass.
CAS #
  • 78-40-0
Chemical Formula
  • C6H15O4P
Element
  • Triethylphosphate
Industry
  • Semiconductor
TMB
Ultrapur™ TMB is a precursor used in deposition of doped silicate glass in low pressure, plasma-enhanced CVD process.
CAS #
  • 121-43-7
Chemical Formula
  • C3H9BO3
Element
  • Trimethylborate
Industry
  • Semiconductor
TMP
UltraPur™ TMP is a precursor used in deposition of doped silicate glass.
CAS #
  • 121-45-9
Chemical Formula
  • C3H9O3P
Element
  • Trimethylphosphite
Industry
  • Semiconductor
UltraPur™ TDMAT is a precursor used in CVD and ALD processes
CAS #
  • 3275-24-9
Chemical Formula
  • C8H24N4Ti
Element
  • Tetrakis(dimethylamido)titanium
Industry
  • Semiconductor
  • Flat Planel Display
If you'd like to add this item to compare, please uncheck one of the other 4 items. If you'd like to add this item to compare, please uncheck one of the other 2 items.