• our science our science Our Science

    • By Industry

      • Life Sciences

      • Microelectronics

        • Semiconductor

        • Data Storage

        • Flat Panel Display

        • LED

        • Solar

      • Industrial

        • Aerospace

        • Chemical Manufacturing

        • Chromatography and Analytical

        • Coatings, Inks, and Adhesives

        • EDM

        • General Industrial

        • Glass Forming

        • Polymer Manufacturing

        • Water Treatment

    • By Role

      • Logic Manufacturers

      • Memory Manufacturers

      • Semiconductor Equipment Manufacturers

      • Chemical Suppliers

      • Bioprocessors

    • By Solution Area

      • Contamination Control

      • Fluid Management

      • Life Sciences

      • Specialty Materials

      • Substrate Handling

    • By Service

      • Analytical Services

      • Field Support Services

      • FOUP Services

      • Refurbishment Services

      • Regeneration Services

      • Technology Centers

        • China Technology Center

        • Life Sciences Technology Center

  • product catalog product catalog Product Catalog

    • Device Trays

      • Tray Wizard

      • H20 Series Accessories

      • H44 Series Accessories

    • Chemistries

      • Chemical Delivery Systems

        • Solid Chemical Delivery Systems

        • Liquid Chemical Delivery Systems

      • Specialty Chemicals

        • Catalysts

        • Coating, Ink, and Adhesive Ingredients

          • Resin Monomers and Components

          • Surface Modifiers

        • Post-CMP Cleaning Solutions

          • Semiconductor Cleaning Solutions

            • PlanarClean® Cleaning Solutions

            • ESC Cleaning Solutions

          • Wide Band Gap Semiconductor Cleaning Solutions

          • HDD Media Substrate Cleaning Solutions

        • Post Etch Cleaning Solutions

          • TitanKlean® Cleaning Solutions

          • ST Cleaning Solutions

          • NOE Etchant Cleaning Solutions

        • Precursors

          • Upstream ALD/CVD Precursors

          • Advanced Deposition Materials (ADM) ALD/CVD Precursors

        • Electronic Chemicals

        • Slurries

        • Silanes

        • Organophosphorus Compounds

        • Specialty Acrylates and Methacrylates

        • Siloxanes

        • Specialty Additives

        • Ligands

        • Wafer Reclaim

    • Fluid Management Systems

      • Fittings Selection Tool

      • Liquid Packaging

        • Chemical and Bioprocessing Containers

          • FluoroPure® HDPE Blowmolded Drums

            • FluoroPure® Advantage Trilayer HDPE Blowmolded Drums

            • FluoroPure® Trilayer HDPE Blowmolded Drums

          • FluoroPure® Composite Drums

          • FluoroPure® Custom Products

        • Single-Use Assemblies

          • 2D and 3D Bags

          • Mixing Systems

          • Motion Bioreactor Bags

          • Microcarrier and Cell Separation Systems

          • Secondary Containment

        • NOWPak® Liner Based Systems

        • Sentry® Quick Connect Systems

        • FluoroPure® Intermediate Bulk Containers

        • FluoroPure® Port Options, Tools and Accessories

        • Tube Sets and Manifolds

        • Custom Dip Tubes

        • FluoroPure® Pressure Vessels

        • Process Tanks

      • Valves Selection Tool

      • Fluid Handling

        • Fittings

          • PrimeLock® Tube Fittings

          • PrimeLock® ESD Tube Fittings

          • PrimeLock® Accessories

          • Flaretek® Tube Fittings

          • Flaretek® Accessories

          • Cynergy® Fittings

          • Cynergy® Accessories

          • EP PFA Flare Fittings

          • EP PFA Flare Fitting Accessories

          • PureBond® Welded Tube Fittings

          • Quikgrip® Tube Fittings

          • Quikgrip® PFA Nuts

          • Integral Ferrule Tube Fittings

          • Integral Ferrule Accessories

          • Barb PFA Tube Fittings

          • Dual Containment Fittings

          • PureBond® Welded Pipe Fittings

          • PureBond® Accessories

          • NPT Pipe Fittings

          • NPT Accessories

        • Valves

          • CR and CH Series Valves

            • CR4 Series Valves

            • CR8 Series Valves

            • CH8 Series High-Temperature Valves

            • CRE4 Series Valves

            • CRE8 Series Valves

          • Integra® Valves

          • Cynergy® Valves

          • EP PFA Valves

          • Manifolds and Assemblies

          • Plug Valves

          • Needle/Metering Valves

          • Stopcock Valves

          • Check Valves

          • Valve Accessories

          • Integra® Plus WS ESD Valves

        • Fluid Handling Accessories

          • Spray Products

          • Aspirators

          • Fasteners

        • Valves Selection Tool

        • Fittings Selection Tool

        • Tubing and Pipe

        • Custom Products

      • Process Monitoring

        • Process Control

          • Integrated Flow Controllers

          • NT™ Proportional Control Valves

          • Photochemical Dispense Pumps

        • Process Measurement

          • Concentration Monitors

          • Electronic Flowmeters

          • NT™ Pressure Transducers

        • Particle Characterization

    • Gas Filtration and Purification

      • Gas Diffusers

        • Chambergard™ Gas Diffusers

      • Gas Filters

        • Other Gas Filters

        • In-Line PTFE Gas Filters

        • In-Line Stainless Steel Gas Filters

        • In-Line Nickel Gas Filters

        • Surface Mount Gas Filters

      • AMC Filters

        • Stepper and Scanner Filters

        • Process Tool Air Filters

        • Facility Filtration

        • Filter Housings and Stand-alone Filter Cabinets

      • Gas Purifiers

    • Hard Disk Component Handling

      • Storage Boxes and Individual Disk Packages

      • Read-Write Trays and Carriers

      • Disk Shippers

      • Disk Process Carriers

    • Liquid Filtration and Purification

      • Liquid Filters

      • Liquid Purifiers

      • Liquid Filter Housings

    • Mask and Reticle Handling

      • Reticle Pods and Purge Cabinets

      • Mask Carriers and Shipping Boxes

      • Mask Packages

    • Other Substrate Handling

      • Miscellaneous Device Processing

      • Solar Cell Solutions

    • Specialty Materials

      • Premium Graphite

        • Industrial Graphite Grades

        • Semiconductor Graphite Grades

        • Life Sciences Graphite Grades

        • Premium Graphite Components

        • Glass Forming Graphite Grades

        • GLASSMATE® Components

        • Graphite Processing Options

      • Coatings

        • Chucks

        • Plasma Enhanced Chemical Vapor Deposition (PECVD) Coatings

        • Caerus™ Coating Technology

        • Pegasus™ Coating Technology

      • Premium Silicon Carbide

        • SUPERSiC<sup>®</sup> Silicon Carbide Components

        • SUPERSiC<sup>®</sup> Silicon Carbide

      • Advanced Cleaning Materials

    • Specialty Gases

      • Specialty Gas Mixtures

      • Gas Delivery Cylinder Systems

      • Gas Delivery Cabinet Systems

      • Gases

    • Wafer Handling

      • Wafer Processing

        • CMP Cleaning Brushes

        • CMP Pads

        • 300 mm Front Opening Unified Pods (FOUPs)

        • 200 mm Wafer Processing

        • 200 mm Accessories

        • 150 mm Wafer Processing

        • 150 mm and Smaller Wafer Carrier Accessories

        • 125 mm Wafer Processing

        • 100 mm Wafer Processing

        • 76.2 mm 3" Wafer Processing

        • 2.5" and Smaller Wafer Processing

        • Labware

        • Chucks

      • Wafer Shipping

        • 150 mm Wafer Shippers

        • 125 mm and Smaller Wafer Shippers

        • 300 mm Wafer Shippers

        • 200 mm Wafer Shippers

      • Finished Wafer Shipping

        • SmartStack® Contactless Horizontal Wafer Shipper

        • SmartStack® Horizontal Wafer Shippers

        • Film Frame Rings and Shippers

  • resources resources Resources

    • Reference Materials

    • Technical Information

      • Calculators and Tools

      • Chemical Compatibility

      • Chemlock® Filter Housing Technical Information

      • Component Technical Information

      • Entegris Test Standards and Protocols

      • FAQ

      • Formulas

      • Glossary

      • Material Properties and Safety

      • Particle Characterization Applications

    • Industry Insights

      • 3D NAND Solutions

      • Achieving Hydrogen Purity Standards for Fuel Cells

      • Advanced Coatings

      • Advanced Deposition Materials Innovation

      • Automotive Reliability

      • Cars and Chips: The Acceleration of Electronic Systems

      • Chasing the Perfect Pattern

      • Chemical Mechanical Planarization (CMP)

      • Clean Chemical Delivery

      • Clean Gas Delivery

      • CMP Process Monitoring

      • Cold Chain Bioprocessing

      • Dual Containment Tubing

      • Electrostatic Discharge (ESD) Prevention

      • Enabling Advanced Lithography

      • End-to-End Gas Filtration Solutions

      • Food and Beverage Contamination Control

      • Front-end to Back-end Solutions

      • Glass in Front; Glass in Back

      • High-Density Cell Banking

      • High Purity Chemical Manufacturing

      • Holistic Approach to Enabling Device Performance, Yield, and Reliability

      • Internet of Things

      • Low-Temperature Bioprocessing

      • More Than Just a Chip Tray

      • Operational Excellence

      • Pandemic Response

      • Particle Characterization

      • Pervasive Defectivity in Semiconductor Manufacturing

      • Protecting Your Data Center Environment from Gas-Phase Contamination

      • The Rare Air of the Semiconductor Fab

      • Silicon Carbide CMP Solutions

      • The Silicon Precursor Toolbox for Low-Temperature Deposition

      • Solid Precursors and Delivery Systems

      • Solutions in Advanced Logic

      • Solving Advanced Technology Challenges with Innovative Materials

      • Storage Class Memory

      • Targeted Contaminant Removal

      • Specialty Gases and Delivery Systems for Ion Implantation

      • Accelerating Speed-to-Yield with High-Purity Materials Solutions

    • Ensights (Blog)

    • Scientific Report

  • about us about us About Us

    • Corporate Overview

    • Corporate Social Responsibility

    • Careers

    • Events

    • Investor Relations

    • Legal/Trademark Notices

    • Locations

    • News Releases

    • Media Coverage

    • Entegris Blog

    • Manufacturing

Our Sites Our Sites Our Sites
more more More

Valve Accessories

Numerous accessories are available to secure and maintain valves used in your fluid handling network

Learn about the numerous accessories available that help you secure and maintain Entegris valves used in ultrapure, corrosive fluid applications. Accessories include mounting bases, repair kits, tool kits and safety lock out devices.

VIEW OUR VALVE SELECTION TOOL

Narrow Your Selection
  • Accessory Type
Integra® 2-way Valve Mounting Bases
Integra® 2-way Valve Mounting Bases
Integra® 2-way Valve Mounting Bases
Enables easier and quicker 1/4" and 1/2" Integra® valve installation during equipment builds and removal during equipment preventive maintenance
Accessory Type
  • Mounting base
Safety Lock Outs
Safety Lock Outs
Safety Lock Outs
Our safety lock out devices increase equipment and operator safety
Accessory Type
  • Safety lock out device
Integra® Valve Repair and Tool Kits
Integra® Valve Repair and Tool Kits
Integra® Valve Repair and Tool Kits
Repair kits and tool kits are available to help extend the life of your Integra® valves
Accessory Type
  • Repair kit
In-line Controlled Actuation Speed (CAS) Device for Integra® Valves
In-line Controlled Actuation Speed (CAS) Device for Integra® Valves
In-line Controlled Actuation Speed (CAS) Device for Integra® Valves
Minimize particle generation with our in-line controlled actuation device, for use with pneumatic Integra® valves
Accessory Type
  • Controlled actuation speed device
1/4" and 1/2" Integra® Valve Position Indicator Covers
1/4" and 1/2" Integra® Valve Position Indicator Covers
1/4" and 1/2" Integra® Valve Position Indicator Covers
The protective cover safeguards Integra® valves while in service with wet environments or during spray down applications
Accessory Type
  • Position indicator cover
Integra® 2-way High Pressure and 3-way Valve Mounting Bases
Integra® 2-way High Pressure and 3-way Valve Mounting Bases
Integra® 2-way High Pressure and 3-way Valve Mounting Bases
Enables easier and quicker 1/2" 2-way high pressure and 3-way Integra® valve installation during equipment builds and removal during equipment preventive maintenance
Accessory Type
  • Mounting base
Integra® Sampling and Custom Valve Mounting Bases
Integra® Sampling and Custom Valve Mounting Bases
Integra® Sampling and Custom Valve Mounting Bases
Install and remove 1/2" Integra® sampling valves and 1/2" Integra custom valves more easily and quickly with our stand alone mounting bases
Accessory Type
  • Mounting base
CR4, CH8 and CR8 Series Valve Repair Kits
CR4, CH8 and CR8 Series Valve Repair Kits
CR4, CH8 and CR8 Series Valve Repair Kits
Repair kits are available to help extend the life of your CR4, CR8 and CH8 Series valves
Accessory Type
  • Repair kit
CR4 Series Valve Mounting Bases
CR4 Series Valve Mounting Bases
CR4 Series Valve Mounting Bases
Quickly and easily install and remove CR4 Series and Galtek SG Series valves with our stand alone mounting bases
Accessory Type
  • Mounting base
Remote Position Indication Sensor Mounting Assembly
Remote Position Indication Sensor Mounting Assembly
Remote Position Indication Sensor Mounting Assembly
Enables remote electronic position indication on Integra® Plus WS valves and EP PFA pneumatic valves
Accessory Type
  • Position indication sensor assembly
Load More
Related Product Categories
EP PFA Valves

We offer a comprehensive line of reliable high-flow, manual and pneumatic valves that meet your needs for large volume chemical delivery.  
Integra® Valves

High-purity, corrosion-resistant Integra® valves offer reliable performance in high-purity, aggressive chemical applications. With no external metal parts, the valves are safe and will not corrode in harsh environments. 
Solenoid Valves

All wetted parts in our powerful, compact 1/4" solenoid valves are designed for high-purity and corrosive applications. 
Stack Valves

This innovatively designed 3-way valve has the ports located on one plane so they may be easily stacked side by side, significantly reducing footprint in your fluid handling system. 
Plug Valves

We offer Magnaflo® and fast acting Galtek® plug valves that provide durable, corrosion-resistance in aggressive chemical applications. For use in the same applications as traditional ball valves.
Stopcock Valves

We offer reliable stopcock valves for any instrumentation need. 1/8" orifice valves are available in 2-way, 2-way 90° and 3-way configurations.
Check Valves

Corrosion-resistant Galtek® check valves reduce contamination potential in your high-purity chemical applications. An O-ring-free design provides a simple, clean, compact valve with a high flow rate.  
Manifolds and Assemblies

Whether a subassembly or an entire system, Entegris can fabricate your unique product utilizing plastic machining, welding, bonding and/or general fabrication. 
SG Series Valves

Ideal where space is limited, our Galtek® SG Series valves set the standard for small valves with all-PFA wetted surfaces used in CMP and high purity semiconductor fluid handling applications. 
Cynergy® Valves

Cynergy® valves with beadless weld or industry standard clamp connections are designed for applications involving ultrapure water, water for injection, corrosive chemistries or biotechniques.
Needle/Metering Valves

Our portfolio of Accuflo™ metering and needle valves, and Galtek® needle valves provide reliable options for you to accurately control media flow in corrosive environments.
Integra® Plus WS ESD Valves

The weir-style valve body design streamlines the flow path and eliminates dead volume; ideal in CMP slurry and bulk chemical applications, pneumatic actuation.

If you'd like to add this item to compare, please uncheck one of the other 4 items. If you'd like to add this item to compare, please uncheck one of the other 2 items.
-->