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  • Industry
  • Process
  • Actuator Type
  • Port Connection
  • Port Size
Provides 2-way pneumatic control of low- to medium-flow applications with flow factors ranging from 1.8 to 3.4 Cv. Capable of handling ultrapure chemicals with media temperatures up to 200°C (392°F).
Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
  • Solar
  • Life Sciences
Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
  • C-Silicon
  • Thin Film
  • Fine Chemicals
Actuator Type
  • Pneumatic normally closed
  • Tube
Configuration
  • 2-way
Provides 2-way pneumatic control of low- to medium-flow applications with flow factors ranging from 1.8 to 3.4 Cv. Capable of handling ultrapure chemicals with media temperatures up to 200°C (392°F).
Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
  • Solar
  • Life Sciences
Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
  • C-Silicon
  • Thin Film
  • Fine Chemicals
Actuator Type
  • Pneumatic normally closed
  • Luer
Configuration
  • 2-way
CR4 Series valves are the smallest, all-PFA valves available for high-purity chemical handling in line sizes 3/8” and smaller. Our manual, toggle panel mount valve has a compact, modular design that enables manifold customization. Rated to 160°C (320°F).
Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
  • Solar
  • Life Sciences
Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
  • C-Silicon
  • Thin Film
  • Fine Chemicals
Actuator Type
  • Manual toggle
Configuration
  • 2-way
CR4 Series valves are the smallest, all-PFA valves available for high-purity chemical handling in line sizes 3/8” and smaller. Our manual, toggle valve has a compact, modular design that enables manifold customization. Rated to 160°C (320°F).
Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
  • Solar
  • Life Sciences
Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
  • C-Silicon
  • Thin Film
  • Fine Chemicals
Actuator Type
  • Manual toggle
Configuration
  • 2-way
CR4 Series valves are the smallest, all-PFA valves available for high-purity chemical handling in line sizes 3/8” and smaller. Our pneumatic, normally closed Luer valve has a compact, modular design that enables manifold customization. Rated to 160°C (320°F).
Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
  • Solar
  • Life Sciences
Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
  • C-Silicon
  • Thin Film
  • Fine Chemicals
Actuator Type
  • Pneumatic normally closed
  • Luer
Configuration
  • 2-way
CR4 Series valves are the smallest, all-PFA valves available for high-purity chemical handling in line sizes 3/8” and smaller. Our manual, multi-turn valve has a compact, modular design that enables manifold customization. Rated to 160°C (320°F).
Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
  • Solar
  • Life Sciences
Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
  • C-Silicon
  • Thin Film
  • Fine Chemicals
Actuator Type
  • Manual multi-turn
Configuration
  • 2-way
Provides 2-way pneumatic control of low- to medium-flow applications with flow factors ranging from 1.8 to 3.4 Cv. Capable of handling ultrapure chemicals with media temperatures up to 180°C (392°F).
Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
  • Solar
  • Life Sciences
Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
  • C-Silicon
  • Thin Film
  • Fine Chemicals
Actuator Type
  • Pneumatic normally open
  • Tube
Configuration
  • 2-way
CR4 Series valves are the smallest, all-PFA valves available for high-purity chemical handling in line sizes 3/8” and smaller. Our pneumatic, normally closed Luer valve has a compact, modular design that enables manifold customization. Rated to 160°C (320°F).
Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
  • Solar
  • Life Sciences
Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
  • C-Silicon
  • Thin Film
  • Fine Chemicals
Actuator Type
  • Pneumatic normally closed
  • Tube
Configuration
  • 2-way
CR4 Series valves are the smallest, all-PFA valves available for high-purity chemical handling in line sizes 3/8” and smaller. Our manual, multi-turn panel mount valve has a compact, modular design that enables manifold customization. Rated to 160°C (320°F).
Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
  • Solar
  • Life Sciences
Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
  • C-Silicon
  • Thin Film
  • Fine Chemicals
Actuator Type
  • Manual multi-turn
Configuration
  • 2-way
Provides 2-way pneumatic control of low- to medium-flow applications with flow factors ranging from 1.8 to 3.4 Cv. Capable of handling ultrapure chemicals with media temperatures up to 200°C (392°F).
Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
  • Solar
  • Life Sciences
Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
  • C-Silicon
  • Thin Film
  • Fine Chemicals
Actuator Type
  • Pneumatic normally open
  • Luer
Configuration
  • 2-way
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