Sapphire Slurries
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- Provides high finish for optical surfaces
- Polish all surface types (lapped or mechanically polished) to achieve atomically smooth surface finish
Specifications
Product family | Process step | Polishing substrate | Key features | Material removal rate (MRR) |
SP 1000 series | CMP | C-plane, A-plane |
Excellent surface finish Ra <0.1 nm (5x5 AFM scan) | 2.0 - 6.0 µm/hr |
SP 3000 series | Lapping | C-plane, A-plane, R-plane |
Ultra-high removal rates while maintaining extremely low sub-surface damage
Ra 0.7 to 1 nm (5x5 AFM scan) |
20 - 25 µm/hr |
SA-GR-80 series | Grinding | C-plane, A-plane, R-plane |
Pad-based grinding process that provides bulk removal step with 5x lower sub-surface damage compared to conventional grinding processes with similar removal rates | 450 - 550 µm/hr |
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