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Slurries

Our scalable portfolio includes high performance slurries that reduce COO and maintain low defectivity

We are a market leader in the design and production of CMP slurries for polishing ultra-hard surface materials such as SiC (silicon carbide), sapphire, GaN (gallium nitride), and diamond (lapped or mechanically polished) into epi-ready condition. The synergy between the specialized chemistry and engineered particles is a key enabling technology for our CMP solutions. Our broad slurry portfolio is optimized for batch and single wafer CMP systems and provides high uniformity and easy scalability to multiple wafers for high-volume manufacturing.

Robust R&D efforts, combined with our state-of-the-art capabilities and team of world-renowned scientists and engineers, help our customers solve their most complex planarization and surface preparation challenges. Using best-know-methods (BKM), our R&D and manufacturing teams can custom design slurries for specific applications. Unique processes we have developed include an ultra-rapid process to fabricate SiC substrates, sub-surface damage-free sapphire windows, and ultra-precise copper polishing.

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Narrow Your Selection
  • Product Type
  • Industry
  • Process
Diamond Slurries
Diamond Slurries
Diamond Slurries
High performance slurries for scalable polishing of diamond substrates and films
Product Type
  • Ultra-Hard Substrate Slurry
 Industry
  • Industrial
  • WBG Semiconductor (WBGS)
 Process
  • CMP
Nitride Slurries
Nitride Slurries
Nitride Slurries
High performance slurries for scalable manufacturing of atomically smooth and defect-free nitride surfaces
Product Type
  • Ultra-Hard Substrate Slurry
 Industry
  • Industrial
  • WBG Semiconductor (WBGS)
 Process
  • CMP
  • Lapping
Polycrystalline Silicon Carbide Slurries
Polycrystalline Silicon Carbide Slurries
Polycrystalline Silicon Carbide Slurries
High performance slurries for scalable manufacturing of low roughness and defect-free polycrystalline silicon carbide (poly-SiC) wafers
Industry
  • Industrial
  • WBG Semiconductor (WBGS)
 Process
  • Lapping
  • CMP
Sapphire Slurries
Sapphire Slurries
Sapphire Slurries
High performance slurries for scalable manufacturing of sapphire wafers
Industry
  • Industrial
  • WBG Semiconductor (WBGS)
 Process
  • CMP
  • Lapping
Silicon Carbide (SiC) Slurries
Silicon Carbide (SiC) Slurries
Silicon Carbide (SiC) Slurries
High performance slurries for scalable manufacturing of low defectivity power and semi-insulating SiC (silicon carbide) substrates
Industry
  • Industrial
  • WBG Semiconductor (WBGS)
 Process
  • CMP
  • Lapping
Dielectric CMP Polishing Slurries
Dielectric CMP Polishing Slurries
Dielectric CMP Polishing Slurries
For polishing dielectric layers in the advanced integrations that are used in leading-edge technology applications.
Tungsten CMP Polishing Slurries
Tungsten CMP Polishing Slurries
Tungsten CMP Polishing Slurries
Optimal for requirements of next-generation advanced node applications, and offers excellent removal rate, defectivity, and topography for all W applications.
Aluminum CMP Polishing Slurries
Aluminum CMP Polishing Slurries
Aluminum CMP Polishing Slurries
Excel at removing aluminum and the complex stack of work-function metals within the transistor gates of advanced semiconductor High-K Metal Gate (HKMG) devices.
Barrier CMP Polishing Slurries
Barrier CMP Polishing Slurries
Barrier CMP Polishing Slurries
Designed to meet extensive technical requirements for barrier applications.
Copper CMP Polishing Slurries
Copper CMP Polishing Slurries
Copper CMP Polishing Slurries
Broad portfolio of copper slurries that are used globally and tailored to different Cu CMP requirements.
Related Product Categories
Wafer Reclaim

The RegenSi® family of solutions provides an all wet method for reclaiming or recycling used test wafers.  By removing dielectric and metal layers without the need for a subsequent CMP process, the RegenSi family increases the effective lifetime each test wafer - thereby reducing the customers test wafer spend.
Silanes

We excel in the development and manufacturing of high-quality silanes for a range of industrial and chemical processes.

Organophosphorus Compounds

We excel in the development and manufacturing of high-quality organophosphorus compounds for a wide range of applications from pharmaceuticals and industrial products to medical diagnostic reagents.

Specialty Acrylates and Methacrylates

Chemical building blocks used to make polymers for coatings and paints, sealants, adhesives, and inks. Their unique properties make them ideal for a variety of eye care, dentistry, and other biomedical applications as well.

Siloxanes

Used extensively in biomedical applications including eye and wound care medical devices. They are desirable as an intermediate or raw material in industrial applications including analytical R&D, coatings and adhesives, and chemical manufacturing.

Specialty Additives

We offer specialty additives used in coatings, inks, and adhesives including benzophenones, acetates, and sulfonic acid salts. Our organic offering includes materials used in photochromic and thermochromic dyes and inks.

Ligands

We offer Buchwald, chiral, phosphine, and additional ligands to support polymer manufacturing and small molecule pharmaceutical production.

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