NT™ Integrated Flow Controllers, Model 6500
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NT™ Flow Viscosity, Density and Temperature Correction
Use our Flow Viscosity, Density and Temperature Correction tool to calculate a full scale flow correction for media other than DI water at 23°C.
Flow Range: Flow ranges are scaled to zero flow, measurement is from 10-100% of full scale flow range.
Sensor Interface: Selection is dependent on application and chemical media.Please contact Entegris for the best selection.
Seals:The primary and secondary seals are Perfrez® 6375UP and Viton® material, respectively.
Product specified with a flared tube connection is packaged with two PVDF nuts. For alternative nut materials, or custom configurations and specifications, please contact Entegris.
Combined with our differential pressure based flowmeter and leading-edge control valve technology, this closed-loop flow controller is ideal for:
- Continuous flow control for critical dispense applications
- Replacing existing peristaltic pumps for CMP slurry dispense
- Batch control for chemical spiking and blending
- On-demand chemical mixing applications
Specifications
| Dimensions | |||
| Inlet/Outlet Port Connection | A | B | C |
| 1/4" Flaretek tube fitting | 123.4 mm (4.86") | 244.1 mm (9.61") | 19.6 mm (0.77") |
| 3/8" Flaretek tube fitting | 123.4 mm (4.86") | 247.7 mm (9.75") | 19.6 mm (19.6") |
| 1/2" Flaretek tube fitting | 127.0 mm (5.00") | 251.7 mm (9.91") | 21.6 mm (0.85") |
| 3/4" Flaretek tube fitting | 134.9 mm (5.31") | 257.8 mm (10.15") | 25.7 mm (1.01") |
| Materials | Wetted parts: | Body | PTFE |
| Diaphragms | PTFE | ||
| Sensor interface | PFA or CTFE | ||
| Primary O-ring | Perfrez® | ||
| Nonwetted parts: | Polypropylene, FEP, PVDF, and Viton® (In addition to materials listed above.) |
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| Process temperature | 10-65°C (50 to 149°F) | ||
| Electrical input | 24 VDC (±10%) at 1 amp | ||
| Electrical output | Two 4-20 mA electrically isolated outputs, one for flow and one for pressure | ||
| Flow measurement | ±1% of full scale from 20 to 100% of flow range ±2.5% of full scale from 10 to 20% of flow range [Calibrated using deionized water at 23°C (73°F)] |
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| Repeatability | ±0.5% of full scale from 20 to 100% of flow range ±1% of full scale from 10 to 20% of flow range |
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| Pressure measurement range | 0-414 kPa (0 to 60 psig) | ||
| Minimum operating pressure (at the inlet) | 69 kPa (10 psig) | ||
| Maximim operating pressure | 414 kPa (60 psig) | ||
| Over-pressure limit | 690 kPa (100 psig) | ||
| Pressure measurement accuracy | ±1% of full scale (includes combined effects of linearity, hysteresis and repeatability) | ||
| Electrical enclosure | IP54 | ||
| Reliability | Wetted parts, >3 million cycles | ||
| Response time | <3 seconds from 10 to 95% of full scale flow range | ||
| Setpoint input signal | 4-20 mA, 0-10 VDC, 0-5 VDC | ||
| Approvals | CE (Declaration of Conformity is attached in Reference Material) | ||
| Note: specifications are subject to change without notice. Please consult Entegris for the most current information. | |||
| Flow Range | ||||||||||
| Fitting Size | T0 | T1 | T2 | T3 | T4 | T5 | T6 | T7 | T8 | T9 |
| 0-50 ml/min. | 0-125 ml/min. | 0-250 ml/min. | 0-500 ml/min. | 0-1250 ml/min. | 0-2.5 l/min. | 0-5 l/min. | 0-10 l/min. | 0-20 l/min. | 0-40 l/min. | |
| 1/4" (F02) | Yes | Yes | Yes | Yes | Yes | - | - | - | - | - |
| 3/8" (F03) | Yes | Yes | Yes | Yes | Yes | Yes | Yes | - | - | - |
| 1/2" (F04) | - | - | Yes | Yes | Yes | Yes | Yes | Yes | Yes | - |
| 3/4" (F06) | - | - | - | - | - | - | - | Yes | Yes | Yes |
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NT™ Flow Viscosity, Density and Temperature Correction
Use our Flow Viscosity, Density and Temperature Correction tool to calculate a full scale flow correction for media other than DI water at 23°C.
Flow Range: Flow ranges are scaled to zero flow, measurement is from 10-100% of full scale flow range.
Sensor Interface: Selection is dependent on application and chemical media.Please contact Entegris for the best selection.
Seals:The primary and secondary seals are Perfrez® 6375UP and Viton® material, respectively.
Product specified with a flared tube connection is packaged with two PVDF nuts. For alternative nut materials, or custom configurations and specifications, please contact Entegris.