Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
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For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Chambergard™ BGN Fast Vent diffusers deliver high-volume throughput and rapid venting to atmosphere. Using a patented, sintered nickel filter element, Chambergard™ BGN diffuser load lock chambers fill at a higher rate without particle disturbance or excessive turbulance.
Rapid vent, gentle flow to atmosphere increases system throughput by minimizing load lock vent cycle time
Provides rapid venting to atmosphere
Patented, sintered nickel technology in a compact diffuser
Easy installation/retrofit into existing tools with minimal downtime
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ApplicationsChambergard™ BGN Fast Vent Diffusers Applications
Bulk Gas Delivery
Connection fitting types: Inlet gasket seal (VCR® compatible) or butt weld. Outlet - ISO NW bulkhead mounting compatible vacuum flange (compatible with standard ISO Quick Fitting, KF or QF, bulkhead clamps), or none (flangeless)