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Chambergard™ BGN Fast Vent Diffusers

Deliver high-volume throughput and rapid venting to atmosphere, allowing the load lock and/or transfer chamger to fill at a higher rate without particle disturbance or excessive turbulance.

  • Patented, sintered nickel technology provides superior performance in all applications
  • Design enables removal of particles from incoming gas greater than 0.0015 µm, minimizing wafer defects
  • Patented, sintered nickel technology in a compact diffuser
  • Easy installation/retrofit into existing tools with minimizes downtime
  • Read More Read Less
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