Wafergard® GT-Plus In-line Gas Filters

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Reliably remove particles from inert gases with flow rates up to 30 slpm.

Provide efficient, low-cost, point-of-use filtration of inert gases
> 99.9999999% removal of all particles greater than 0.015 µm diameter

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Applications Wafergard® GT-Plus In-line Gas Filters Applications

Low air intake filter
Wafer transport systems
Clean dry air (CDA)

Specifications

Performance Data

Product Specifications

Materials	Membrane:	Hydrophobic fluoropolymer PTFE
	Supports, housings:	PFA
Recommended flow rate	30 slpm
Connections	1/8", 1/4" compression seal
Membrane area	12 cm² (1.9 in²)
Particle retention	>99.9999999% removal of all particles greater than 0.0015 μm diameter (verified at the most penetrating particle size)
Operating conditions	Maximum operating pressure:	0.41 MPa (4.1 bar, 56.6 psid) at 20°C
	Maximum forward differential pressure:	0.34 MPa (3.4 bar, 50.0 psid) at 20°C
	Maximum reverse differential pressure:	0.03 MPa (0.3 bar, 4.35 psid) at 20°C
	Maximum operating temperature:	50°C (122°F)
Dimensions	Length:	1/8" seal: 69 mm (2.7”) 1/4" seal: 71.5 mm (2.8”)
	Diameter:	21.5 mm (0.85”)

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Reference Materials Product Documentation

Published Dec 1, 2023 Data Sheet Wafergard® GT-Plus and GTL In-line Gas Filters

510.1 kB

Published Nov 2, 2020 Manual and Guide Wafergard® Gas Filter Compatibility Guide

102.3 kB

Accessories Wafergard® GT-Plus In-line Gas Filters Accessories

JPMFJK001

6.34 mm (1/4") PFA compression ferrule and nut for use with Wafertard® GT-Plus gas filters

Part Numbers

Wafergard® GT-Plus In-line Gas Filters Part Numbers

Part Number	Fitting Size and Type	Length	Select Option
WGFG01KP0	1/8" Compression seal	69.0 mm (2.7")	10-pack filter
WGFG01KP3	1/8" Compression seal	69.0 mm (2.7")	3-pack filter
WGFG21KP0	1/4" Compression seal	71.5 mm (2.8")	10-pack filter
WGFG21KP3	1/4" Compression seal	71.5 mm (2.8")	3-pack filter