Wafergard® MAX-1000 In-line PTFE Gas Filter
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- Filtration of SiCl4, GeCL4, and POCl3
- Optical fiber application
- Silica glass application
Specifications
Materials | Membrane | Hydrophobic PTFE membrane supported by molded PFA structures |
Housing | 316L stainless steel | |
O-ring | Encapsulated fluoroelastomer (E-FKM) | |
Surface finish interior | ≤25 μin Ra (RR4, SS4), ≤7 μin Ra (RR6) | |
Removal rating | ≥99.9999999% removal of ≥0.0015 μm particles in gas | |
Downstream cleanliness | <0.03 particles/liter (<1 particle/ft3) >0.01 μm | |
Maximum operating conditions | Maximum inlet pressure | 37 bar (538 psig) |
Maximum forward differential pressure | 3.9 bar (57 psig) | |
Maximum reverse differential pressure | 2.5 bar (36 psid)/RR4, SS4 0.5 bar (7 psid)/RR6 | |
Maximum operating temperature | 120°C (248°F) | |
Helium leak rating | 1 × 10-10 Pa.m3/sec | |
Warranty | 1 year |
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