Wafergard® MAX-1000 In-line PTFE Gas Filter

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These in-line gas filters utilize PTFE membranes supported by PFA structures and 316L stainless steel housings, provide superior particulate filtration in ultrapure gas applications.

Large filtration area with 3x larger filtration, low pressure drop and high flow
Same length dimension as current filter generation allows easy implementation without design changes of gas panel or delivery system
Extended filter lifetime, 3x longer than earlier generation

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Applications Wafergard® MAX-1000 In-line PTFE Gas Filter Applications

Filtration of SiCl₄, GeCL_4, and POCl₃
Optical fiber application
Silica glass application

Specifications

Drawings

Performance Data

Product Specifications

Materials	Membrane	Hydrophobic PTFE membrane supported by molded PFA structures
	Housing	316L stainless steel
	O-ring	Encapsulated fluoroelastomer (E-FKM)
Surface finish interior	≤25 μin Ra (RR4, SS4), ≤7 μin Ra (RR6)
Removal rating	≥99.9999999% removal of ≥0.0015 μm particles in gas
Downstream cleanliness	<0.03 particles/liter (<1 particle/ft³) >0.01 μm
Maximum operating conditions	Maximum inlet pressure	37 bar (538 psig)
	Maximum forward differential pressure	3.9 bar (57 psig)
	Maximum reverse differential pressure	2.5 bar (36 psid)/RR4, SS4 0.5 bar (7 psid)/RR6
	Maximum operating temperature	120°C (248°F)
Helium leak rating	1 × 10^-10 Pa.m³/sec
Warranty	1 year

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Reference Materials Product Documentation

Published Apr 16, 2021 Data Sheet Wafergard® MAX-1000 In-line PTFE Gas Filter

301.9 kB

Published Apr 16, 2021 Data Sheet Wafergard® MAX-1000 In-line PTFE Gas Filter - A4

301.9 kB

Published Nov 2, 2020 Manual and Guide Wafergard® Gas Filter Compatibility Guide

102.3 kB

Part Numbers

Wafergard® MAX-1000 In-line PTFE Gas Filter Part Numbers

Part Number	Fitting Size and Type	Length
WGMXLBSS4	1/2" compression seal (Swagelok® compatible), male inlet/outlet	118.7 mm (4.67")
WGMXLPRR6	3/4" gasket seal (compatible with VCR® fitting), male inlet/outlet	158.8 mm (6.25")