Wafergard® MAX HT In-line Gas Filters

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Superior particulate filtration for high-temperature, ultrapure gas applications.

Designed for high-temperature TEOS and high-k applications up to 200°C (392°F)
Overall design (148 mm [5.82"]) is a drop-in replacement for similar filters
The compact size fits many existing delivery systems and provides design flexibility and versatility
Special baking enables rapid gas delivery startup
Low differential pressure provides stable and improved material delivery

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Applications Wafergard® MAX HT In-line Gas Filters Applications

Point-of-use filter for CVD tools
High-temperature applications like TEOS and high-k
Hot N₂ applications

Specifications

Drawings

Performance Data

Product Specifications

Materials	Membrane	PTFE
	Support	PFA
	Housing	316L stainless steel
Removal particle rating	≥0.0015 µm
Particle retention	≥99.9999999% @ 25°C (77°F)
Initial downstream cleanliness	≤0.03 particles/liter greater than 0.01 μm
Internal surface finish	≤7 μin Ra (Ra <0.17 μm)
Connections	1/2" gasket seal male (VCR^® compatible)
Operating conditions	Maximum operating pressure	0.99 MPa (9.9 bar; 143.15 psig) @ 0° to 200°C (0° to 392°F)
	Maximum forward differential pressure	0.70 MPa (7 bar; 101.5 psid) @ 0° to 40°C (0° to 104°F)
		0.08 MPa (0.8 bar; 11.6 psid) @ 200°C (392°F)
	Maximum operating temperature	200°C (392°F) in inert gases
Helium leak rating	<1 x 10^-10 Pa•m³/sec
Flow rating	Refer to performance data

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Reference Materials Product Documentation

Published Jan 31, 2025 Data Sheet Wafergard® MAX HT In-line Gas Filters

242.1 kB

Published Jan 31, 2025 Data Sheet Wafergard® MAX HT In-line Gas Filters - A4

242.0 kB

Published Nov 2, 2020 Manual and Guide Wafergard® Gas Filter Compatibility Guide

102.3 kB

Part Numbers

Wafergard® MAX HT In-line Gas Filters Part Numbers

Part Number	Length
WGMXMPRR4HT	127 mm (5.00")
WGMXMPRR4HTL	148 mm (5.83")