Wafergard® MAX HT In-line Gas Filters
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- Point-of-use filter for CVD tools
- High-temperature applications like TEOS and high-k
- Hot N2 applications
Specifications
Materials | Membrane | PTFE |
Support | PFA | |
Housing | 316L stainless steel | |
Removal particle rating | ≥0.0015 µm | |
Particle retention | ≥99.9999999% @ 25°C (77°F) | |
Initial downstream cleanliness | ≤0.03 particles/liter greater than 0.01 μm | |
Internal surface finish | ≤7 μin Ra (Ra <0.17 μm) | |
Connections | 1/2" gasket seal male (VCR® compatible) | |
Operating conditions | Maximum operating pressure | 0.99 MPa (9.9 bar; 143.15 psig) @ 0° to 200°C (0° to 392°F) |
Maximum forward differential pressure | 0.70 MPa (7 bar; 101.5 psid) @ 0° to 40°C (0° to 104°F) | |
0.08 MPa (0.8 bar; 11.6 psid) @ 200°C (392°F) | ||
Maximum operating temperature | 200°C (392°F) in inert gases | |
Helium leak rating | <1 x 10-10 Pa•m3/sec | |
Flow rating | Refer to performance data |
Successfully Opted for software Updates
Part Number | Length |
---|---|
WGMXMPRR4HT | 127 mm (5.00") |
WGMXMPRR4HTL | 148 mm (5.83") |