Wafergard® GT-Plus In-line Gas Filters
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- Low air intake filter
- Wafer transport systems
- Clean dry air (CDA)
Specifications
Materials | Membrane: | Hydrophobic fluoropolymer PTFE |
Supports, housings: | PFA | |
Recommended flow rate | 30 slpm | |
Connections | 1/8", 1/4" compression seal | |
Membrane area | 12 cm2 (1.9 in2) | |
Particle retention | >99.9999999% removal of all particles greater than 0.0015 μm diameter (verified at the most penetrating particle size) | |
Operating conditions | Maximum operating pressure: | 0.41 MPa (4.1 bar, 56.6 psid) at 20°C |
Maximum forward differential pressure: | 0.34 MPa (3.4 bar, 50.0 psid) at 20°C | |
Maximum reverse differential pressure: | 0.03 MPa (0.3 bar, 4.35 psid) at 20°C | |
Maximum operating temperature: | 50°C (122°F) | |
Dimensions | Length: | 1/8" seal: 69 mm (2.7”) 1/4" seal: 71.5 mm (2.8”) |
Diameter: | 21.5 mm (0.85”) |
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JPMFJK001
6.34 mm (1/4") PFA compression ferrule and nut for use with Wafertard® GT-Plus gas filters
Part Number | Fitting Size and Type | Length | Select Option |
---|---|---|---|
WGFG01KP0 | 1/8" Compression seal | 69.0 mm (2.7") | 10-pack filter |
WGFG01KP3 | 1/8" Compression seal | 69.0 mm (2.7") | 3-pack filter |
WGFG21KP0 | 1/4" Compression seal | 71.5 mm (2.8") | 10-pack filter |
WGFG21KP3 | 1/4" Compression seal | 71.5 mm (2.8") | 3-pack filter |