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MegaTorr^® Heated Getter Gas Purifiers

These PS5 helium/argon bulk gas purifiers efficiently remove numerous impurities with high reliability, low cost, and high performance.

Patented getter alloy operates at elevated temperatures to remove impurities by forming irreversible chemical bonds
Designed to last multiple years; once a column is consumed it can be replaced with a new column, for a new lifetime
Downstream of the heated getter columns, hydrogen (H₂) impurities are removed by a patented secondary ambient temperature getter cartridge, known as the Hydrogen Removal Unit (HRU)
Comes standard with GettSafe™ fast response thermal protection, which quickly detects excessive heat in the getter column and takes action to isolate the purifier
Optimized design provides sub-ppb performance in small footprints with one meter front/rear access and flow rates up to 5,833 slpm (350 Nm³/hr)

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Interested in MegaTorr^® Heated Getter Gas Purifiers?

Contact your Entegris account manager or Contact Us

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Applications MegaTorr^® Heated Getter Gas Purifiers Applications

Purifies helium (He) and argon (Ar) for semiconductor applications

Specifications

Dimensions

	Dimensions
Model	H (cm)	W (cm)	D (cm)	Weight (kg)
PS5-MGT15	185	61	89	< 204
PS5-MGT30	185	61	89	< 204
PS5-MGT50	185	61	89	< 240
PS5-MGT100	185	120	89	< 500
PS5-MGT150	185	180	89	< 750
PS5-MGT200	185	242	89	< 1,000
PS5-MGT350	193	193	127	< 1,250

Product Specifications

Gas purified	He, Ar
Impurities removed	H₂O, O₂,CO, CO₂, H₂, N₂, THC (including CH₄^₎ < 1 ppb
Maximum flow rates*	Nm³/hr	slpm
PS5-MGT15	15	250
PS5-MGT30	30	500
PS5-MGT50	50	833
PS5-MGT100	100	1,667
PS5-MGT150	150	2,500
PS5-MGT200	200	3,333
PS5-MGT350	350	5,833
*Other flow rates are available. Contact Entegris for details.
Maximum pressure drop	< 1 bar (100 kPa)
Note:	Purifiers are gas specific and should only be used for the gases indicated

Standard Features

Optional Features

Automated microprocessor controller
HMI (Human Machine Interface)
GettSafe high temperature safety shutdown system
Metal 0.003 µm particle filter
Inlet and outlet sample ports with isolation valves
Automatic bypass
Gas-to-gas heat exchanger
Electric gas preheater system
Air cooled heat exchanger
All metal cabinet with doors
High-temperature hardware interlock
Alarm relay, life status indicator relay, remote contact shutdown, gas relay
Relief valve

Inlet mass flowmeter
Inlet and outlet isolation valves
Instrument air management system
Manual bypass valve
Pneumatically actuated manual bypass valve
Separate control power
UPS - uninterruptible power supply
MODBUS data communication port

Outdoor Enclosure Options (OPAL)

For outdoor installation, see our outdoor enclosure options

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