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MegaTorr® Heated Getter Gas Purifiers
Interested in MegaTorr® Heated Getter Gas Purifiers?
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Reference Materials
Applications
Purifies helium (He) and argon (Ar) for semiconductor applications
Specifications
Dimensions
Dimensions | ||||
Model | H (cm) | W (cm) | D (cm) | Weight (kg) |
PS5-MGT15 | 185 | 61 | 89 | < 204 |
PS5-MGT30 | 185 | 61 | 89 | < 204 |
PS5-MGT50 | 185 | 61 | 89 | < 240 |
PS5-MGT100 | 185 | 120 | 89 | < 500 |
PS5-MGT150 | 185 | 180 | 89 | < 750 |
PS5-MGT200 | 185 | 242 | 89 | < 1,000 |
PS5-MGT350 | 193 | 193 | 127 | < 1,250 |
Gas purified | He, Ar | ||
Impurities removed | H2O, O2, CO, CO2, H2, N2, THC (including CH4) < 1 ppb | ||
Maximum flow rates* | Nm3/hr | slpm | |
PS5-MGT15 | 15 | 250 | |
PS5-MGT30 | 30 | 500 | |
PS5-MGT50 | 50 | 833 | |
PS5-MGT100 | 100 | 1,667 | |
PS5-MGT150 | 150 | 2,500 | |
PS5-MGT200 | 200 | 3,333 | |
PS5-MGT350 | 350 | 5,833 | |
*Other flow rates are available. Contact Entegris for details. | |||
Maximum pressure drop | < 1 bar (100 kPa) | ||
Note: | Purifiers are gas specific and should only be used for the gases indicated |
Standard Features | Optional Features |
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Outdoor Enclosure Options (OPAL)
- For outdoor installation, see our outdoor enclosure options
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