MegaTorr^® Heated Getter Gas Purifiers

These PS5 helium/argon bulk gas purifiers efficiently remove numerous impurities with high reliability, low cost, and high performance.

Patented getter alloy operates at elevated temperatures to remove impurities by forming irreversible chemical bonds
Designed to last multiple years; once a column is consumed it can be replaced with a new column, for a new lifetime
Downstream of the heated getter columns, hydrogen (H₂) impurities are removed by a patented secondary ambient temperature getter cartridge, known as the Hydrogen Removal Unit (HRU)
Comes standard with GettSafe™ fast response thermal protection, which quickly detects excessive heat in the getter column and takes action to isolate the purifier
Optimized design provides sub-ppb performance in small footprints with one meter front/rear access and flow rates up to 5,833 slpm (350 Nm³/hr)

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Applications MegaTorr^® Heated Getter Gas Purifiers Applications

Purifies helium (He) and argon (Ar) for semiconductor applications

Product Specifications

Gas purified	He, Ar
Impurities removed	H₂O, O₂,CO, CO₂, H₂, N₂, THC (including CH₄^₎ < 1 ppb
Maximum flow rates*	Nm³/hr	slpm
PS5-MGT15	15	250
PS5-MGT30	30	500
PS5-MGT50	50	833
PS5-MGT100	100	1,667
PS5-MGT150	150	2,500
PS5-MGT200	200	3,333
PS5-MGT350	350	5,833
*Other flow rates are available. Contact Entegris for details.
Maximum pressure drop	< 1 bar (100 kPa)
Note:	Purifiers are gas specific and should only be used for the gases indicated

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Reference Materials Product Documentation

Published Sep 4, 2019 Brochure Gas Purification Solutions

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MegaTorr® Heated Getter Gas Purifiers