GateKeeper® HGU Heated Getter Gas Purifiers
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Reference Materials
Applications
Purifies N2, He, Ar, Xe, and H2 for semiconductor applications
Specifications
Features
PS2-GC50
- Small and economical purifier for Gas Chromatography (GC) and other low flow analytical applications
PS3-MT3
- Fully automatic controller with fault protection and audible alarm
- High temperature protection
- Replaceable getter cartridge for fast, easy maintenance
PS4-MT3, PS4-MT15, PS4-MT50
- Integral inlet/outlet valves and automatic bypass valve
- Fully automatic controller with fault protection and audible alarm
- High temperature protection
- Life status sensor provides early warning of impending breakthrough of impurities
- Replaceable getter cartridge for fast, easy maintenance
| Gases purified | Impurities removed | |||
| He, Ar, Xe | H2O, O2, CO, CO2, H2, CH4, N2 < 1 ppb | |||
| N2 | H2O, O2, CO, CO2, H2, CH4 < 1 ppb | |||
| H2 | H2O, O2, CO, CO2, N2 < 1 ppb | |||
| Note: | Purifiers are gas specific and should only be used for the gases indicated | |||
| Part Number | Gases Purified | Maximum Flow Rate | Power |
| PS2-GC50-R PS2-GC50-N | He, Ar, Xe N2 | 0.012 Nm3/hr (0.2 slpm) | 110 - 120 VAC or 220 - 240 VAC |
| PS3-MT3-R PS3-MT3-N | He, Ar, Xe N2 | 0.18 Nm3/hr (3 slpm) | 110 - 120 VAC or 220 - 240 VAC |
| PS4-MT3-R PS4-MT3-N PS4-MT3-H | He, Ar, Xe N2 H2 | 3 Nm3/hr (50 slpm) | 110 - 120 VAC or 220 - 240 VAC |
| PS4-MT15-R PS4-MT15-N PS4-MT15-H | He, Ar, Xe N2 H2 | 4.5 Nm3/hr (75 slpm) | 110 - 120 VAC or 220 - 240 VAC |
| PS4-MT50-R PS4-MT50-N PS4-MT50-H | He, Ar, Xe N2 H2 | 6 Nm3/hr (100 slpm) 6 Nm3/hr (100 slpm) 9 Nm3/hr (150 slpm) | 110 - 120 VAC or 220 - 240 VAC |
Successfully Opted for software Updates
Published Aug 7, 2019
Spec Sheet
MonoTorr® Phase II, Rare Gas and Nitrogen Purifier, 50 and 75 slpm
88.3 kB
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