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GateKeeper^® HGU Heated Getter Gas Purifiers

These PS2, PS3, PS4 heated getter gas purifiers utilizes the only purifier technology capable of removing all hydrocarbons and nitrogen from process gases.

Point-of-use (POU) gas purification ensures consistent and repeatable process performance, isolates critical process areas from house gas distribution systems, and protects against gas purity upsets and cross contamination
Provides the most complete removal of impurities for rare gases, nitrogen (N₂), and hydrogen (H₂), with high reliability, low cost, and high performance
The heated getter material forms irreversible chemical bonds with any oxide, carbide, and nitride impurities
Optimized design provides sub-ppb performance, which is better than gas from cylinder or liquid sources, in small footprints with flow rates up to 150 slpm (9 Nm³/hr)

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Applications GateKeeper^® HGU Heated Getter Gas Purifiers Applications

Purifies N₂, He, Ar, Xe, and H₂ for semiconductor applications

Specifications

Features

PS2-GC50

Small and economical purifier for Gas Chromatography (GC) and other low flow analytical applications

PS3-MT3

Fully automatic controller with fault protection and audible alarm
High temperature protection
Replaceable getter cartridge for fast, easy maintenance

PS4-MT3, PS4-MT15, PS4-MT50

Integral inlet/outlet valves and automatic bypass valve
Fully automatic controller with fault protection and audible alarm
High temperature protection
Life status sensor provides early warning of impending breakthrough of impurities
Replaceable getter cartridge for fast, easy maintenance

Product Specifications

Gases purified	Impurities removed
He, Ar, Xe	H₂O, O₂, CO, CO₂, H₂, CH₄, N₂ < 1 ppb
N₂	H₂O, O₂, CO, CO₂, H₂, CH₄< 1 ppb
H₂	H₂O, O₂, CO, CO₂, N₂ < 1 ppb
Note:	Purifiers are gas specific and should only be used for the gases indicated

Part Number	Gases Purified	Maximum Flow Rate	Power
PS2-GC50-R PS2-GC50-N	He, Ar, Xe N₂	0.012 Nm³/hr (0.2 slpm)	110 - 120 VAC or 220 - 240 VAC
PS3-MT3-R PS3-MT3-N	He, Ar, Xe N₂	0.18 Nm³/hr (3 slpm)	110 - 120 VAC or 220 - 240 VAC
PS4-MT3-R PS4-MT3-N PS4-MT3-H	He, Ar, Xe N₂H₂	3 Nm³/hr (50 slpm)	110 - 120 VAC or 220 - 240 VAC
PS4-MT15-R PS4-MT15-N PS4-MT15-H	He, Ar, Xe N₂H₂	4.5 Nm³/hr (75 slpm)	110 - 120 VAC or 220 - 240 VAC
PS4-MT50-R PS4-MT50-N PS4-MT50-H	He, Ar, Xe N₂ H₂	6 Nm³/hr (100 slpm) 6 Nm³/hr (100 slpm) 9 Nm³/hr (150 slpm)	110 - 120 VAC or 220 - 240 VAC

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Apr 1, 2021 Data Sheet GateKeeper® HGU Heated Getter Purifiers

822.3 kB

Published Aug 7, 2019 Spec Sheet MonoTorr® Phase II, Rare Gas and Nitrogen Purifier, 50 and 75 slpm

88.3 kB

GateKeeper® HGU Heated Getter Gas Purifiers

Specifications

Features

GateKeeper^® HGU Heated Getter Gas Purifiers